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{ ?s ?p Growth of crystalline SiC films by triode plasma CVD using an organosilicon compound ?g. }
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W1967183671
title
"
Growth of crystalline SiC films by triode plasma CVD using an organosilicon compound
"
@default
.
W4234933147
title
"
Growth of crystalline SiC films by triode plasma CVD using an organosilicon compound
"
@default
.