FRINK Linked Data Fragments server
SemOpenAlex
Search SemOpenAlex by triple/quad pattern
subject
predicate
object
graph
Matches in SemOpenAlex for
{ ?s ?p Modeling of a 2f-CCP in SF$_6$/O$_2$ for high-speed MEMS processiong ?g. }
Showing items 1 to 1 of
1
with
100
items per page.
W2611687788
title
"
Modeling of a 2f-CCP in SF$_6$/O$_2$ for high-speed MEMS processiong
"
@default
.
