FRINK Linked Data Fragments server
SemOpenAlex
Search SemOpenAlex by triple/quad pattern
subject
predicate
object
graph
Matches in SemOpenAlex for
{ ?s ?p Simulation and Optimization of Film Thickness Uniformity in Physical Vapor Deposition ?g. }
Showing items 1 to 1 of
1
with
100
items per page.
W2891638747
title
"
Simulation and Optimization of Film Thickness Uniformity in Physical Vapor Deposition
"
@default
.
