FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2048671681> ?p ?o ?g. }

• W2048671681 endingPage "8887" @default.
• W2048671681 startingPage "8884" @default.
• W2048671681 abstract "We have developed a multiscale CVD model in which we coupled consistently the gas phase and surface dynamics. In particular at the macroscale we solve overall mass, momentum, and energy conservation equations with the finite element method, while at the microscale the morphological evolution of the film is investigated with 3D kinetic Monte Carlo. Macro and microscales are linked together imposing continuity of gas phase concentrations and fluxes at the common boundary. The surface model implemented in KMC takes into account the Si(100)2 × 1 surface reconstruction, and the anisotropic diffusion of H and Si adatoms and dimers. Our simulations show that the diffusion of adsorbed species when most of the surface is covered by hydrogen can hinder the formation of Si dimers, which are favorable Si adsorption sites, affecting the overall growth rate. This indicates that a macroscale model in which an elementary surface kinetic mechanism is implemented cannot predict accurately Si film growth rates at low temperatures, when the surface is mostly covered by adsorbed species. Also, the comparison between experimental and calculated data suggests that a hydrogen desorption mechanism different from the intradimer pathway is active, and that Si adatoms might play a role." @default.
• W2048671681 created "2016-06-24" @default.
• W2048671681 creator A5003627178 @default.
• W2048671681 creator A5024796198 @default.
• W2048671681 creator A5059651035 @default.
• W2048671681 creator A5076982732 @default.
• W2048671681 date "2007-09-01" @default.
• W2048671681 modified "2023-10-08" @default.
• W2048671681 title "Multiscale investigation of the influence of surface morphology on thin film CVD" @default.
• W2048671681 cites W1967259202 @default.
• W2048671681 cites W2010556797 @default.
• W2048671681 cites W2010737596 @default.
• W2048671681 cites W2012494369 @default.
• W2048671681 cites W2014099523 @default.
• W2048671681 cites W2040414272 @default.
• W2048671681 cites W2043938859 @default.
• W2048671681 cites W2050053321 @default.
• W2048671681 cites W2051169849 @default.
• W2048671681 cites W2053768446 @default.
• W2048671681 cites W2056577791 @default.
• W2048671681 cites W2074400411 @default.
• W2048671681 cites W2083278943 @default.
• W2048671681 cites W2087231122 @default.
• W2048671681 cites W2137971290 @default.
• W2048671681 cites W2157315945 @default.
• W2048671681 cites W4247960614 @default.
• W2048671681 doi "https://doi.org/10.1016/j.surfcoat.2007.04.071" @default.
• W2048671681 hasPublicationYear "2007" @default.
• W2048671681 type Work @default.
• W2048671681 sameAs 2048671681 @default.
• W2048671681 citedByCount "7" @default.
• W2048671681 countsByYear W20486716812016 @default.
• W2048671681 countsByYear W20486716812020 @default.
• W2048671681 countsByYear W20486716812021 @default.
• W2048671681 countsByYear W20486716812023 @default.
• W2048671681 crossrefType "journal-article" @default.
• W2048671681 hasAuthorship W2048671681A5003627178 @default.
• W2048671681 hasAuthorship W2048671681A5024796198 @default.
• W2048671681 hasAuthorship W2048671681A5059651035 @default.
• W2048671681 hasAuthorship W2048671681A5076982732 @default.
• W2048671681 hasConcept C105795698 @default.
• W2048671681 hasConcept C120665830 @default.
• W2048671681 hasConcept C121332964 @default.
• W2048671681 hasConcept C135889238 @default.
• W2048671681 hasConcept C145420912 @default.
• W2048671681 hasConcept C147789679 @default.
• W2048671681 hasConcept C150394285 @default.
• W2048671681 hasConcept C15696416 @default.
• W2048671681 hasConcept C159467904 @default.
• W2048671681 hasConcept C162711632 @default.
• W2048671681 hasConcept C171250308 @default.
• W2048671681 hasConcept C178790620 @default.
• W2048671681 hasConcept C179428855 @default.
• W2048671681 hasConcept C185592680 @default.
• W2048671681 hasConcept C19067145 @default.
• W2048671681 hasConcept C192562407 @default.
• W2048671681 hasConcept C19499675 @default.
• W2048671681 hasConcept C29452124 @default.
• W2048671681 hasConcept C33923547 @default.
• W2048671681 hasConcept C45786274 @default.
• W2048671681 hasConcept C512968161 @default.
• W2048671681 hasConcept C54355233 @default.
• W2048671681 hasConcept C62520636 @default.
• W2048671681 hasConcept C69357855 @default.
• W2048671681 hasConcept C85725439 @default.
• W2048671681 hasConcept C86803240 @default.
• W2048671681 hasConcept C97355855 @default.
• W2048671681 hasConceptScore W2048671681C105795698 @default.
• W2048671681 hasConceptScore W2048671681C120665830 @default.
• W2048671681 hasConceptScore W2048671681C121332964 @default.
• W2048671681 hasConceptScore W2048671681C135889238 @default.
• W2048671681 hasConceptScore W2048671681C145420912 @default.
• W2048671681 hasConceptScore W2048671681C147789679 @default.
• W2048671681 hasConceptScore W2048671681C150394285 @default.
• W2048671681 hasConceptScore W2048671681C15696416 @default.
• W2048671681 hasConceptScore W2048671681C159467904 @default.
• W2048671681 hasConceptScore W2048671681C162711632 @default.
• W2048671681 hasConceptScore W2048671681C171250308 @default.
• W2048671681 hasConceptScore W2048671681C178790620 @default.
• W2048671681 hasConceptScore W2048671681C179428855 @default.
• W2048671681 hasConceptScore W2048671681C185592680 @default.
• W2048671681 hasConceptScore W2048671681C19067145 @default.
• W2048671681 hasConceptScore W2048671681C192562407 @default.
• W2048671681 hasConceptScore W2048671681C19499675 @default.
• W2048671681 hasConceptScore W2048671681C29452124 @default.
• W2048671681 hasConceptScore W2048671681C33923547 @default.
• W2048671681 hasConceptScore W2048671681C45786274 @default.
• W2048671681 hasConceptScore W2048671681C512968161 @default.
• W2048671681 hasConceptScore W2048671681C54355233 @default.
• W2048671681 hasConceptScore W2048671681C62520636 @default.
• W2048671681 hasConceptScore W2048671681C69357855 @default.
• W2048671681 hasConceptScore W2048671681C85725439 @default.
• W2048671681 hasConceptScore W2048671681C86803240 @default.
• W2048671681 hasConceptScore W2048671681C97355855 @default.
• W2048671681 hasIssue "22-23" @default.
• W2048671681 hasLocation W20486716811 @default.
• W2048671681 hasOpenAccess W2048671681 @default.
• W2048671681 hasPrimaryLocation W20486716811 @default.

• next