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- W1553089559 endingPage "432" @default.
- W1553089559 startingPage "429" @default.
- W1553089559 abstract "p-type shallow junctions in silicon were obtained by preamorphization with Ge? ions, 20 KeV B+ implants at doses in the 5* 1014 - 5*1O15/Cm2 range, and thermal annealing at 850 °C or 950 °C for 1/2 hr. The junction depth was ≪ 0.3 ?m in the preamorphized wafers and ≫ 0.3 ?m in the B-bare Si implanted wafers. The leakage current density measured at a reverse bias of 10 v was about 100 pA/cm2 for both procedures. The leakage maps on the 5'' wafer gave a density of short circuits of 0.6/cm2." @default.
- W1553089559 created "2016-06-24" @default.
- W1553089559 creator A5014279437 @default.
- W1553089559 creator A5020390079 @default.
- W1553089559 creator A5040585430 @default.
- W1553089559 creator A5065475514 @default.
- W1553089559 creator A5069135661 @default.
- W1553089559 date "1987-09-01" @default.
- W1553089559 modified "2023-10-18" @default.
- W1553089559 title "Shallow Junctions of Boron Implanted in GE + Preamorphized ≪100≫ Si Wafers" @default.
- W1553089559 hasPublicationYear "1987" @default.
- W1553089559 type Work @default.
- W1553089559 sameAs 1553089559 @default.
- W1553089559 citedByCount "0" @default.
- W1553089559 crossrefType "proceedings-article" @default.
- W1553089559 hasAuthorship W1553089559A5014279437 @default.
- W1553089559 hasAuthorship W1553089559A5020390079 @default.
- W1553089559 hasAuthorship W1553089559A5040585430 @default.
- W1553089559 hasAuthorship W1553089559A5065475514 @default.
- W1553089559 hasAuthorship W1553089559A5069135661 @default.
- W1553089559 hasConcept C113196181 @default.
- W1553089559 hasConcept C139719470 @default.
- W1553089559 hasConcept C145148216 @default.
- W1553089559 hasConcept C160671074 @default.
- W1553089559 hasConcept C162324750 @default.
- W1553089559 hasConcept C178790620 @default.
- W1553089559 hasConcept C185592680 @default.
- W1553089559 hasConcept C191897082 @default.
- W1553089559 hasConcept C192562407 @default.
- W1553089559 hasConcept C2777042071 @default.
- W1553089559 hasConcept C2777855556 @default.
- W1553089559 hasConcept C41823505 @default.
- W1553089559 hasConcept C43617362 @default.
- W1553089559 hasConcept C49040817 @default.
- W1553089559 hasConcept C501308230 @default.
- W1553089559 hasConcept C544956773 @default.
- W1553089559 hasConcept C550623735 @default.
- W1553089559 hasConceptScore W1553089559C113196181 @default.
- W1553089559 hasConceptScore W1553089559C139719470 @default.
- W1553089559 hasConceptScore W1553089559C145148216 @default.
- W1553089559 hasConceptScore W1553089559C160671074 @default.
- W1553089559 hasConceptScore W1553089559C162324750 @default.
- W1553089559 hasConceptScore W1553089559C178790620 @default.
- W1553089559 hasConceptScore W1553089559C185592680 @default.
- W1553089559 hasConceptScore W1553089559C191897082 @default.
- W1553089559 hasConceptScore W1553089559C192562407 @default.
- W1553089559 hasConceptScore W1553089559C2777042071 @default.
- W1553089559 hasConceptScore W1553089559C2777855556 @default.
- W1553089559 hasConceptScore W1553089559C41823505 @default.
- W1553089559 hasConceptScore W1553089559C43617362 @default.
- W1553089559 hasConceptScore W1553089559C49040817 @default.
- W1553089559 hasConceptScore W1553089559C501308230 @default.
- W1553089559 hasConceptScore W1553089559C544956773 @default.
- W1553089559 hasConceptScore W1553089559C550623735 @default.
- W1553089559 hasLocation W15530895591 @default.
- W1553089559 hasOpenAccess W1553089559 @default.
- W1553089559 hasPrimaryLocation W15530895591 @default.
- W1553089559 hasRelatedWork W1614059887 @default.
- W1553089559 hasRelatedWork W1925183368 @default.
- W1553089559 hasRelatedWork W1977494638 @default.
- W1553089559 hasRelatedWork W1981788776 @default.
- W1553089559 hasRelatedWork W1988167290 @default.
- W1553089559 hasRelatedWork W1988245999 @default.
- W1553089559 hasRelatedWork W1990402429 @default.
- W1553089559 hasRelatedWork W1996880777 @default.
- W1553089559 hasRelatedWork W2013493318 @default.
- W1553089559 hasRelatedWork W2029420563 @default.
- W1553089559 hasRelatedWork W2029443791 @default.
- W1553089559 hasRelatedWork W2033105942 @default.
- W1553089559 hasRelatedWork W2046383234 @default.
- W1553089559 hasRelatedWork W2059228154 @default.
- W1553089559 hasRelatedWork W2060331289 @default.
- W1553089559 hasRelatedWork W2066651215 @default.
- W1553089559 hasRelatedWork W2100026680 @default.
- W1553089559 hasRelatedWork W2104138783 @default.
- W1553089559 hasRelatedWork W2167849002 @default.
- W1553089559 hasRelatedWork W2545852007 @default.
- W1553089559 isParatext "false" @default.
- W1553089559 isRetracted "false" @default.
- W1553089559 magId "1553089559" @default.
- W1553089559 workType "article" @default.