Matches in SemOpenAlex for { <https://semopenalex.org/work/W1984653312> ?p ?o ?g. }
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- W1984653312 endingPage "L1045" @default.
- W1984653312 startingPage "L1045" @default.
- W1984653312 abstract "We have developed a novel lithography technique, called the “volume-change thermal-lithography”, for fabricating minute dots in less than 100 nm diameter. The combination of the temperature distribution induced by a focused laser beam with a Gaussian distribution and a specially designed multilayer, which consists of TbFeCo and ZnS-SiO 2 films, enabled us to produce minute dots. Using a laser beam with a 405 nm wavelength, we succeeded in fabricating dots whose pitch and size are far beyond the optical diffraction limit. Furthermore, we delineated letters of approximately 1 µm size by dot arrangement for showing the high potential for more complicate fabrication using the technique." @default.
- W1984653312 created "2016-06-24" @default.
- W1984653312 creator A5002992836 @default.
- W1984653312 creator A5020487480 @default.
- W1984653312 creator A5072637966 @default.
- W1984653312 creator A5085812152 @default.
- W1984653312 date "2004-07-23" @default.
- W1984653312 modified "2023-09-30" @default.
- W1984653312 title "Nanoscale Dots Fabrication by Volume Change Thermal Lithography" @default.
- W1984653312 cites W2042176259 @default.
- W1984653312 cites W2055340724 @default.
- W1984653312 cites W2058034748 @default.
- W1984653312 cites W2061669803 @default.
- W1984653312 cites W2087591599 @default.
- W1984653312 cites W2174506322 @default.
- W1984653312 doi "https://doi.org/10.1143/jjap.43.l1045" @default.
- W1984653312 hasPublicationYear "2004" @default.
- W1984653312 type Work @default.
- W1984653312 sameAs 1984653312 @default.
- W1984653312 citedByCount "5" @default.
- W1984653312 countsByYear W19846533122012 @default.
- W1984653312 countsByYear W19846533122013 @default.
- W1984653312 crossrefType "journal-article" @default.
- W1984653312 hasAuthorship W1984653312A5002992836 @default.
- W1984653312 hasAuthorship W1984653312A5020487480 @default.
- W1984653312 hasAuthorship W1984653312A5072637966 @default.
- W1984653312 hasAuthorship W1984653312A5085812152 @default.
- W1984653312 hasConcept C105487726 @default.
- W1984653312 hasConcept C120665830 @default.
- W1984653312 hasConcept C121332964 @default.
- W1984653312 hasConcept C124657808 @default.
- W1984653312 hasConcept C136525101 @default.
- W1984653312 hasConcept C137905882 @default.
- W1984653312 hasConcept C142724271 @default.
- W1984653312 hasConcept C153294291 @default.
- W1984653312 hasConcept C171250308 @default.
- W1984653312 hasConcept C192562407 @default.
- W1984653312 hasConcept C200274948 @default.
- W1984653312 hasConcept C204223013 @default.
- W1984653312 hasConcept C204530211 @default.
- W1984653312 hasConcept C204787440 @default.
- W1984653312 hasConcept C20556612 @default.
- W1984653312 hasConcept C207114421 @default.
- W1984653312 hasConcept C2779227376 @default.
- W1984653312 hasConcept C45206210 @default.
- W1984653312 hasConcept C49040817 @default.
- W1984653312 hasConcept C520434653 @default.
- W1984653312 hasConcept C53524968 @default.
- W1984653312 hasConcept C62520636 @default.
- W1984653312 hasConcept C71924100 @default.
- W1984653312 hasConceptScore W1984653312C105487726 @default.
- W1984653312 hasConceptScore W1984653312C120665830 @default.
- W1984653312 hasConceptScore W1984653312C121332964 @default.
- W1984653312 hasConceptScore W1984653312C124657808 @default.
- W1984653312 hasConceptScore W1984653312C136525101 @default.
- W1984653312 hasConceptScore W1984653312C137905882 @default.
- W1984653312 hasConceptScore W1984653312C142724271 @default.
- W1984653312 hasConceptScore W1984653312C153294291 @default.
- W1984653312 hasConceptScore W1984653312C171250308 @default.
- W1984653312 hasConceptScore W1984653312C192562407 @default.
- W1984653312 hasConceptScore W1984653312C200274948 @default.
- W1984653312 hasConceptScore W1984653312C204223013 @default.
- W1984653312 hasConceptScore W1984653312C204530211 @default.
- W1984653312 hasConceptScore W1984653312C204787440 @default.
- W1984653312 hasConceptScore W1984653312C20556612 @default.
- W1984653312 hasConceptScore W1984653312C207114421 @default.
- W1984653312 hasConceptScore W1984653312C2779227376 @default.
- W1984653312 hasConceptScore W1984653312C45206210 @default.
- W1984653312 hasConceptScore W1984653312C49040817 @default.
- W1984653312 hasConceptScore W1984653312C520434653 @default.
- W1984653312 hasConceptScore W1984653312C53524968 @default.
- W1984653312 hasConceptScore W1984653312C62520636 @default.
- W1984653312 hasConceptScore W1984653312C71924100 @default.
- W1984653312 hasIssue "8B" @default.
- W1984653312 hasLocation W19846533121 @default.
- W1984653312 hasOpenAccess W1984653312 @default.
- W1984653312 hasPrimaryLocation W19846533121 @default.
- W1984653312 hasRelatedWork W1506498111 @default.
- W1984653312 hasRelatedWork W1599891132 @default.
- W1984653312 hasRelatedWork W1983850620 @default.
- W1984653312 hasRelatedWork W2002873055 @default.
- W1984653312 hasRelatedWork W2007100303 @default.
- W1984653312 hasRelatedWork W2055465336 @default.
- W1984653312 hasRelatedWork W2144086325 @default.
- W1984653312 hasRelatedWork W2164909123 @default.
- W1984653312 hasRelatedWork W4234684427 @default.
- W1984653312 hasRelatedWork W4321482428 @default.
- W1984653312 hasVolume "43" @default.
- W1984653312 isParatext "false" @default.
- W1984653312 isRetracted "false" @default.
- W1984653312 magId "1984653312" @default.
- W1984653312 workType "article" @default.