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- W1991575295 abstract "Optical edges refer to the cut-lines of difference of optical transmissivity. They exist widely on optical coder. Generally the accuracy of edge's positions shows its quality. This paper describes an opto-electric measuring scheme, which integrates the edge's signal by means of linear CCD camera and identifies automatically its position through computer analysis. In the meantime a precise grating is used as measuring unit and a 2D scanning stage which is derived by stepping motors is designed for searching the edges. A microcomputer performs the functions of the system management, data sample and analysis. The measuring error is less than 0.3 micrometers ." @default.
- W1991575295 created "2016-06-24" @default.
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- W1991575295 date "1998-08-10" @default.
- W1991575295 modified "2023-10-08" @default.
- W1991575295 title "<title>Submicron position and measurement system for optical edges</title>" @default.
- W1991575295 doi "https://doi.org/10.1117/12.318401" @default.
- W1991575295 hasPublicationYear "1998" @default.
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