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- W1994984485 abstract "An ultra-high sensitivity Surface Acoustic Wave (SAW) biosensor operated in high order mode for DNA sequences detection is proposed. Nanoscale interdigitals are fabricated on LiNbO3 substrate to achieve a high quality factor of over 4000 at about 6.4GHz. The biosensor shows an excellent linear response to the target DNA in the range of 1ng/ml to 1μg/ml and the difference of hybridized single DNA base can be distinguished. An effective DNA immobilization increases the frequency shifts greatly, which also contributes to the high sensitivity of 6.7×10-16g/cm2/Hz." @default.
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- W1994984485 date "2013-12-01" @default.
- W1994984485 modified "2023-09-26" @default.
- W1994984485 title "A high order mode 6.4GHz ultra-high sensitivity nanoscale surface acoustic wave biosensor" @default.
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- W1994984485 doi "https://doi.org/10.1109/iedm.2013.6724652" @default.
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