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- W1995876997 endingPage "7561" @default.
- W1995876997 startingPage "7556" @default.
- W1995876997 abstract "Langmuir probe, optical emission spectroscopy, and biased quartz crystal microbalance measurements were used to investigate an argon and copper plasma used for ionized physical vapor deposition of copper. Copper vapor generated by a magnetron sputter discharge is ionized upon passing through an argon discharge excited by an internal rf induction antenna. Argon plasma characteristics such as electron temperatures Te, plasma densities ne, and plasma and floating potentials Vp and Vf, were studied as a function of argon pressure and rf power. An increase of plasma density versus rf discharge power and argon pressure was observed. The radial profile of plasma density measured by a Langmuir probe reveals a peak ion density at the center of the rf antenna and an increase in the radial ion concentration gradient with argon pressure. The ratios of optical emission intensities from Cu+ ion and Cu neutral lines increase with rf discharge power and argon pressure. The biased quartz crystal microbalance measurements show an increase of both Cu+ ion flux and the ratio of Cu+ ion to Cu neutral fluxes with rf power and argon pressure; however, they also show a decrease of total Cu flux with increasing argon pressure." @default.
- W1995876997 created "2016-06-24" @default.
- W1995876997 creator A5004094704 @default.
- W1995876997 creator A5024174892 @default.
- W1995876997 creator A5032232083 @default.
- W1995876997 creator A5044756052 @default.
- W1995876997 creator A5088326500 @default.
- W1995876997 date "1999-06-01" @default.
- W1995876997 modified "2023-09-26" @default.
- W1995876997 title "An rf sustained argon and copper plasma for ionized physical vapor deposition of copper" @default.
- W1995876997 cites W1965222882 @default.
- W1995876997 cites W1965495088 @default.
- W1995876997 cites W1986768909 @default.
- W1995876997 cites W1996255228 @default.
- W1995876997 cites W2003980032 @default.
- W1995876997 cites W2008783228 @default.
- W1995876997 cites W2029349634 @default.
- W1995876997 cites W2041813306 @default.
- W1995876997 cites W2053094013 @default.
- W1995876997 cites W2068535149 @default.
- W1995876997 cites W2085945284 @default.
- W1995876997 cites W2094075393 @default.
- W1995876997 doi "https://doi.org/10.1063/1.370554" @default.
- W1995876997 hasPublicationYear "1999" @default.
- W1995876997 type Work @default.
- W1995876997 sameAs 1995876997 @default.
- W1995876997 citedByCount "18" @default.
- W1995876997 countsByYear W19958769972013 @default.
- W1995876997 countsByYear W19958769972015 @default.
- W1995876997 countsByYear W19958769972017 @default.
- W1995876997 countsByYear W19958769972020 @default.
- W1995876997 countsByYear W19958769972022 @default.
- W1995876997 countsByYear W19958769972023 @default.
- W1995876997 crossrefType "journal-article" @default.
- W1995876997 hasAuthorship W1995876997A5004094704 @default.
- W1995876997 hasAuthorship W1995876997A5024174892 @default.
- W1995876997 hasAuthorship W1995876997A5032232083 @default.
- W1995876997 hasAuthorship W1995876997A5044756052 @default.
- W1995876997 hasAuthorship W1995876997A5088326500 @default.
- W1995876997 hasBestOaLocation W19958769972 @default.
- W1995876997 hasConcept C113196181 @default.
- W1995876997 hasConcept C121332964 @default.
- W1995876997 hasConcept C145148216 @default.
- W1995876997 hasConcept C150394285 @default.
- W1995876997 hasConcept C176118016 @default.
- W1995876997 hasConcept C178790620 @default.
- W1995876997 hasConcept C184779094 @default.
- W1995876997 hasConcept C185592680 @default.
- W1995876997 hasConcept C192039680 @default.
- W1995876997 hasConcept C192562407 @default.
- W1995876997 hasConcept C43503373 @default.
- W1995876997 hasConcept C43617362 @default.
- W1995876997 hasConcept C544778455 @default.
- W1995876997 hasConcept C547737533 @default.
- W1995876997 hasConcept C62520636 @default.
- W1995876997 hasConcept C82706917 @default.
- W1995876997 hasConcept C9996572 @default.
- W1995876997 hasConceptScore W1995876997C113196181 @default.
- W1995876997 hasConceptScore W1995876997C121332964 @default.
- W1995876997 hasConceptScore W1995876997C145148216 @default.
- W1995876997 hasConceptScore W1995876997C150394285 @default.
- W1995876997 hasConceptScore W1995876997C176118016 @default.
- W1995876997 hasConceptScore W1995876997C178790620 @default.
- W1995876997 hasConceptScore W1995876997C184779094 @default.
- W1995876997 hasConceptScore W1995876997C185592680 @default.
- W1995876997 hasConceptScore W1995876997C192039680 @default.
- W1995876997 hasConceptScore W1995876997C192562407 @default.
- W1995876997 hasConceptScore W1995876997C43503373 @default.
- W1995876997 hasConceptScore W1995876997C43617362 @default.
- W1995876997 hasConceptScore W1995876997C544778455 @default.
- W1995876997 hasConceptScore W1995876997C547737533 @default.
- W1995876997 hasConceptScore W1995876997C62520636 @default.
- W1995876997 hasConceptScore W1995876997C82706917 @default.
- W1995876997 hasConceptScore W1995876997C9996572 @default.
- W1995876997 hasIssue "11" @default.
- W1995876997 hasLocation W19958769971 @default.
- W1995876997 hasLocation W19958769972 @default.
- W1995876997 hasOpenAccess W1995876997 @default.
- W1995876997 hasPrimaryLocation W19958769971 @default.
- W1995876997 hasRelatedWork W1601588525 @default.
- W1995876997 hasRelatedWork W1619276345 @default.
- W1995876997 hasRelatedWork W1963911796 @default.
- W1995876997 hasRelatedWork W1978583938 @default.
- W1995876997 hasRelatedWork W2069397480 @default.
- W1995876997 hasRelatedWork W2140132324 @default.
- W1995876997 hasRelatedWork W2149039755 @default.
- W1995876997 hasRelatedWork W2159633716 @default.
- W1995876997 hasRelatedWork W4367186977 @default.
- W1995876997 hasRelatedWork W2113046083 @default.
- W1995876997 hasVolume "85" @default.
- W1995876997 isParatext "false" @default.
- W1995876997 isRetracted "false" @default.
- W1995876997 magId "1995876997" @default.
- W1995876997 workType "article" @default.