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- W2003476300 endingPage "1898" @default.
- W2003476300 startingPage "1895" @default.
- W2003476300 abstract "High quality Si3N4 film was formed by the nitridation of Si(110) surface using radical NH. It was found that the gate leakage current through the Si3N4 film is three orders of magnitude smaller than that through the conventional SiO2 film, and the interface states density at midgap for Si3N4/Si interface is less than 5×1010 eV-1 cm-2. High-resolution soft-X-ray-excited Si 2 p spectra were measured for the Si3N4 films formed on Si(100), Si(110) and Si(111). It was found that the crystal orientation of the Si substrate affects the amount of intermediate nitridation states of Si at the Si3N4/Si interface." @default.
- W2003476300 created "2016-06-24" @default.
- W2003476300 creator A5002768298 @default.
- W2003476300 creator A5017855642 @default.
- W2003476300 creator A5027794297 @default.
- W2003476300 creator A5035724354 @default.
- W2003476300 creator A5035807265 @default.
- W2003476300 creator A5040332542 @default.
- W2003476300 creator A5041713581 @default.
- W2003476300 creator A5048657228 @default.
- W2003476300 creator A5062715209 @default.
- W2003476300 creator A5074810414 @default.
- W2003476300 date "2007-04-24" @default.
- W2003476300 modified "2023-09-27" @default.
- W2003476300 title "Electric Characteristics of Si<sub>3</sub>N<sub>4</sub>Films Formed by Directly Radical Nitridation on Si(110) and Si(100) Surfaces" @default.
- W2003476300 cites W1966532284 @default.
- W2003476300 cites W2003533355 @default.
- W2003476300 cites W2003645630 @default.
- W2003476300 cites W2005232247 @default.
- W2003476300 cites W2005874465 @default.
- W2003476300 cites W2010351281 @default.
- W2003476300 cites W2054235135 @default.
- W2003476300 cites W2109354532 @default.
- W2003476300 cites W2128383799 @default.
- W2003476300 cites W2273886880 @default.
- W2003476300 doi "https://doi.org/10.1143/jjap.46.1895" @default.
- W2003476300 hasPublicationYear "2007" @default.
- W2003476300 type Work @default.
- W2003476300 sameAs 2003476300 @default.
- W2003476300 citedByCount "6" @default.
- W2003476300 countsByYear W20034763002016 @default.
- W2003476300 countsByYear W20034763002020 @default.
- W2003476300 countsByYear W20034763002021 @default.
- W2003476300 crossrefType "journal-article" @default.
- W2003476300 hasAuthorship W2003476300A5002768298 @default.
- W2003476300 hasAuthorship W2003476300A5017855642 @default.
- W2003476300 hasAuthorship W2003476300A5027794297 @default.
- W2003476300 hasAuthorship W2003476300A5035724354 @default.
- W2003476300 hasAuthorship W2003476300A5035807265 @default.
- W2003476300 hasAuthorship W2003476300A5040332542 @default.
- W2003476300 hasAuthorship W2003476300A5041713581 @default.
- W2003476300 hasAuthorship W2003476300A5048657228 @default.
- W2003476300 hasAuthorship W2003476300A5062715209 @default.
- W2003476300 hasAuthorship W2003476300A5074810414 @default.
- W2003476300 hasConcept C111368507 @default.
- W2003476300 hasConcept C113196181 @default.
- W2003476300 hasConcept C121332964 @default.
- W2003476300 hasConcept C127313418 @default.
- W2003476300 hasConcept C181500209 @default.
- W2003476300 hasConcept C184779094 @default.
- W2003476300 hasConcept C185592680 @default.
- W2003476300 hasConcept C192562407 @default.
- W2003476300 hasConcept C2777289219 @default.
- W2003476300 hasConcept C43617362 @default.
- W2003476300 hasConcept C49040817 @default.
- W2003476300 hasConcept C544956773 @default.
- W2003476300 hasConcept C8010536 @default.
- W2003476300 hasConceptScore W2003476300C111368507 @default.
- W2003476300 hasConceptScore W2003476300C113196181 @default.
- W2003476300 hasConceptScore W2003476300C121332964 @default.
- W2003476300 hasConceptScore W2003476300C127313418 @default.
- W2003476300 hasConceptScore W2003476300C181500209 @default.
- W2003476300 hasConceptScore W2003476300C184779094 @default.
- W2003476300 hasConceptScore W2003476300C185592680 @default.
- W2003476300 hasConceptScore W2003476300C192562407 @default.
- W2003476300 hasConceptScore W2003476300C2777289219 @default.
- W2003476300 hasConceptScore W2003476300C43617362 @default.
- W2003476300 hasConceptScore W2003476300C49040817 @default.
- W2003476300 hasConceptScore W2003476300C544956773 @default.
- W2003476300 hasConceptScore W2003476300C8010536 @default.
- W2003476300 hasIssue "4B" @default.
- W2003476300 hasLocation W20034763001 @default.
- W2003476300 hasOpenAccess W2003476300 @default.
- W2003476300 hasPrimaryLocation W20034763001 @default.
- W2003476300 hasRelatedWork W1965625584 @default.
- W2003476300 hasRelatedWork W1987666079 @default.
- W2003476300 hasRelatedWork W2013413667 @default.
- W2003476300 hasRelatedWork W2029845838 @default.
- W2003476300 hasRelatedWork W2170478559 @default.
- W2003476300 hasRelatedWork W2312552982 @default.
- W2003476300 hasRelatedWork W2533055162 @default.
- W2003476300 hasRelatedWork W2557732718 @default.
- W2003476300 hasRelatedWork W2592531136 @default.
- W2003476300 hasRelatedWork W3036157976 @default.
- W2003476300 hasVolume "46" @default.
- W2003476300 isParatext "false" @default.
- W2003476300 isRetracted "false" @default.
- W2003476300 magId "2003476300" @default.
- W2003476300 workType "article" @default.