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- W2013124783 abstract "Small amounts (~10 10 atms of Fe) of metal-ion contamination remains on local spots on the backside of the wafer. During a thermal process step, 30% of this contamination is transferred to the front side of the wafer where it causes in some specific cases substrate degradation. The source of the contamination is stainless-steel wafer pins that are used in wafer handling on for example litho tracks. This contamination is printed onto the backside wafer surface where two cleaning steps were not able to remove it. Figure 1. Wafer test: 3 clusters of devices failing due to the tripod signal." @default.
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- W2013124783 date "2012-04-01" @default.
- W2013124783 modified "2023-09-26" @default.
- W2013124783 title "Yield Impact of Backside Metal-Ion Contamination" @default.
- W2013124783 doi "https://doi.org/10.4028/www.scientific.net/ssp.187.287" @default.
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