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• W2017112433 abstract "During the last decade there has been increasing pressure on the materials technologist to provide a quality of silicon which will result in devices having smaller spreads, better performance, higher reliability, and greater chip-complexity; this improvement in the quality of the silicon to go hand-in-hand, of course, with lower material costs. Lower material costs have been obtained by growing ever larger silicon crystals and by using processing equipment capable of handling an ever increasing number of slices per batch, but this trend only further complicates the continuous search for better control of the physical parameters and reduction of the defect concentration — the two materials factors which have the most impact on device quality. This paper examines the levels of physical parameters and defect concentrations which can be achieved at the present time, and draws attention to those areas where progress has not kept pace with device requirements." @default.
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• W2017112433 date "1980-04-01" @default.
• W2017112433 modified "2023-09-27" @default.
• W2017112433 title "Silicon for electronic devices" @default.
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• W2017112433 doi "https://doi.org/10.1016/0022-0248(80)90264-x" @default.
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