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• W2021141618 abstract "We report on the fabrication of two-dimensional photonic crystals (PCs), aimed at operating in compact photonic systems, for optical communications. The targeted device is an optical add drop multiplexer (OADM) whose operation relies on the wavelength-selective and directional coupling of two optical waveguides. The microstructures are fabricated in an InP-based technology by means of a high resolution electron beam patterning generator (HR-EPBG), silicon nitride mask transfer and deep reactive ion etching (DRIE). Successful fabrication of arrays of holes with nano-scale dimensions is demonstrated with aspect ratios of the order of seven for devices operating in the long wavelength windows." @default.
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• W2021141618 date "2002-07-01" @default.
• W2021141618 modified "2023-10-18" @default.
• W2021141618 title "Photonic band gap material for integrated photonic application: technological challenges" @default.
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• W2021141618 doi "https://doi.org/10.1016/s0167-9317(02)00526-9" @default.
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