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• W2022137949 abstract "We demonstrate rapid fabrication of submicrometer-diameter pores in borosilicate glass using femtosecond laser machining and subsequent wet-etch techniques. This approach allows direct and repeatable fabrication of high-quality pores with diameters of 400-800 nm. Such small pores coupled with the desirable electrical and chemical properties of glass enable sensitive resistive-pulse analysis to determine the size and concentration of macromolecules and nanoparticles. Plasma-enhanced chemical vapor deposition allows further reduction of pore diameters to below 300 nm." @default.
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• W2022137949 date "2008-05-14" @default.
• W2022137949 modified "2023-09-28" @default.
• W2022137949 title "Ultrafast laser fabrication of submicrometer pores in borosilicate glass" @default.
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• W2022137949 doi "https://doi.org/10.1364/ol.33.001153" @default.
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