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- W2029266952 abstract "In this paper, we present the design, fabrication process, and testing results of an artificial hair cell sensor made by liquid metal encapsulated in a polydimethylsiloxane (PDMS) substrate. Previously, a flexible force sensor was reported from our group, which can detect both normal and shear forces by using liquid metal alloy (Ga-In-Sn) as piezoresistive gauge material encapsulated in a PDMS substrate. Based on this method, we propose an artificial hair cell sensor which can detect two-axis tactile force with a standing artificial hair shaft. Since the liquid-metal piezoresistors deform with the elastomeric substrate, normal and shear force can be detected with resistance changes of the piezoresistors. Each force sensor comprises a pair of symmetric piezoresistors, which is screen-printed on a suspended PDMS membrane with opposite direction to be sensitive to shear forces. The testing results demonstrate the sensitivity of the force sensor in two-axis directions." @default.
- W2029266952 created "2016-06-24" @default.
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- W2029266952 date "2013-04-01" @default.
- W2029266952 modified "2023-09-25" @default.
- W2029266952 title "Artificial hair cell sensors using liquid metal alloy as piezoresistors" @default.
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- W2029266952 doi "https://doi.org/10.1109/nems.2013.6559886" @default.
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