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- W2036222470 abstract "We report wavefront measurement of a multilayer-coated, reflective optical system at 13.4-nm wavelength performed using a novel phase-shifting point-diffraction interferometer. Successful interferometric measurements of a 10x Schwarzschild objective designed for extreme ultraviolet projection lithography with 0.1-micrometer resolution demonstrate high- precision with sub-nanometer resolution. The goal of the interferometry is to achieve wavefront measurement accuracy beyond lambda/50 rms at EUV wavelengths. Preliminary measurements are discussed and the paths toward achieving the target accuracy are identified." @default.
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- W2036222470 date "1997-07-07" @default.
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- W2036222470 title "Characterization of an EUV Schwarzschild objective using phase-shifting point diffraction interferometry" @default.
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- W2036222470 doi "https://doi.org/10.1117/12.275787" @default.
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