Matches in SemOpenAlex for { <https://semopenalex.org/work/W2039821284> ?p ?o ?g. }
Showing items 1 to 72 of
72
with 100 items per page.
- W2039821284 abstract "Theoretical expressions for silicon layer deposition from silane pyrolysis within an open isothermal reactor tube has been derived for 0.5th order of chemical reaction with restricting the discussion to homogeneous gas reaction, and compared to the analogous expressions of chemical reaction characterized by 1st order relationship. Both kinds of theoretical equations give results free from contradictions when applied to experimentally based data of silane consumption on the one hand and silicon deposition distribution on the other, at least, with respect to those data published by Puga. First order reaction is characterized by an activation energy of ΔEaSi = 34 – 39 kcal/mole, and 0.5th order reaction by ΔEaSi = 23 – 26 kcal/mole. Chemical reaction of 0.5th order is to be preferred rather than 1st order.Fur die Siliciumabscheidung durch Pyrolyse von Silan in einem offenen isothermen Rohrreaktor werden theoretische Ausdrucke fur den Fall einer 0.5-ten Ordnung der chemischen Reaktion entwickelt und mit analogen, fur den Fall der Reaktion erster Ordnung geltenden Beziehungen verglichen. Beide Satze theoretischer Gleichungen liefern widerspruchsfreie Ergebnisse, wenn man sie auf experimentell-bezogene Angaben zum Silanverbrauch auf der einen und zur Verteilung des abgeschiedenen Siliciums auf der anderen Seite anwendet. Diese Aussage gilt zumindestens fur die von Puga veroffentlichten Daten. Die Reaktion erster Ordnung fuhrt zur Charakterisierung des Siliciumabscheidungsprozesses durch eine Aktivierungsenergie der Grose ΔEaSi = 34 – 39 kcal/Mol, die 0.5-te Reaktionsordnung zu ΔEaSi = 23 – 26 kcal/Mol. Im Rahmen der vorliegenden Betrachtung ist die 0.5-te Reaktionsordnung gegenuber einer Reaktion erster Ordnung zu bevorzugen." @default.
- W2039821284 created "2016-06-24" @default.
- W2039821284 creator A5033994466 @default.
- W2039821284 date "1990-07-01" @default.
- W2039821284 modified "2023-09-25" @default.
- W2039821284 title "On chemical kinetics of silicon deposition from silane (II). Comparing 1st- and 0.5th-reaction order" @default.
- W2039821284 doi "https://doi.org/10.1002/crat.2170250711" @default.
- W2039821284 hasPublicationYear "1990" @default.
- W2039821284 type Work @default.
- W2039821284 sameAs 2039821284 @default.
- W2039821284 citedByCount "2" @default.
- W2039821284 crossrefType "journal-article" @default.
- W2039821284 hasAuthorship W2039821284A5033994466 @default.
- W2039821284 hasConcept C121332964 @default.
- W2039821284 hasConcept C135502975 @default.
- W2039821284 hasConcept C147789679 @default.
- W2039821284 hasConcept C148898269 @default.
- W2039821284 hasConcept C178790620 @default.
- W2039821284 hasConcept C185592680 @default.
- W2039821284 hasConcept C188027245 @default.
- W2039821284 hasConcept C2778024649 @default.
- W2039821284 hasConcept C36663273 @default.
- W2039821284 hasConcept C36759035 @default.
- W2039821284 hasConcept C544956773 @default.
- W2039821284 hasConcept C62520636 @default.
- W2039821284 hasConcept C66882249 @default.
- W2039821284 hasConcept C93391505 @default.
- W2039821284 hasConcept C95121573 @default.
- W2039821284 hasConcept C97355855 @default.
- W2039821284 hasConceptScore W2039821284C121332964 @default.
- W2039821284 hasConceptScore W2039821284C135502975 @default.
- W2039821284 hasConceptScore W2039821284C147789679 @default.
- W2039821284 hasConceptScore W2039821284C148898269 @default.
- W2039821284 hasConceptScore W2039821284C178790620 @default.
- W2039821284 hasConceptScore W2039821284C185592680 @default.
- W2039821284 hasConceptScore W2039821284C188027245 @default.
- W2039821284 hasConceptScore W2039821284C2778024649 @default.
- W2039821284 hasConceptScore W2039821284C36663273 @default.
- W2039821284 hasConceptScore W2039821284C36759035 @default.
- W2039821284 hasConceptScore W2039821284C544956773 @default.
- W2039821284 hasConceptScore W2039821284C62520636 @default.
- W2039821284 hasConceptScore W2039821284C66882249 @default.
- W2039821284 hasConceptScore W2039821284C93391505 @default.
- W2039821284 hasConceptScore W2039821284C95121573 @default.
- W2039821284 hasConceptScore W2039821284C97355855 @default.
- W2039821284 hasLocation W20398212841 @default.
- W2039821284 hasOpenAccess W2039821284 @default.
- W2039821284 hasPrimaryLocation W20398212841 @default.
- W2039821284 hasRelatedWork W1498168262 @default.
- W2039821284 hasRelatedWork W1532209379 @default.
- W2039821284 hasRelatedWork W1607257295 @default.
- W2039821284 hasRelatedWork W1878711833 @default.
- W2039821284 hasRelatedWork W1886099171 @default.
- W2039821284 hasRelatedWork W1923795641 @default.
- W2039821284 hasRelatedWork W1965443631 @default.
- W2039821284 hasRelatedWork W1974362179 @default.
- W2039821284 hasRelatedWork W2001126695 @default.
- W2039821284 hasRelatedWork W2006365530 @default.
- W2039821284 hasRelatedWork W2027262148 @default.
- W2039821284 hasRelatedWork W2064461436 @default.
- W2039821284 hasRelatedWork W2083292080 @default.
- W2039821284 hasRelatedWork W2091640279 @default.
- W2039821284 hasRelatedWork W2109260368 @default.
- W2039821284 hasRelatedWork W2137765287 @default.
- W2039821284 hasRelatedWork W2269348128 @default.
- W2039821284 hasRelatedWork W2885984441 @default.
- W2039821284 hasRelatedWork W2952190822 @default.
- W2039821284 hasRelatedWork W1908807815 @default.
- W2039821284 isParatext "false" @default.
- W2039821284 isRetracted "false" @default.
- W2039821284 magId "2039821284" @default.
- W2039821284 workType "article" @default.