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• W2045561241 abstract "The properties of diamond-like carbon (DLC) films can vary widely from graphite (sp2 local bonding) to diamond (sp3 local bonding), strongly depending on the film preparation conditions. As the optical constants (n,k) of sp3 bonded carbon are quite different from those of sp2 bonded carbon over the visible and near-infrared (VIS–NIR) spectral range, it is possible to provide precise quantitative information on sp3 C (sp2 C) fractions using optical characterization methods. In the present work, spectroscopic ellipsometry (SE) using multiple sample analysis method has been applied to study a series of DLC films on silicon substrates prepared by filtered arc deposition (FAD) technique. In contrast to most reported SE studies, the DLC film was simulated by a mixture of sp3 C, sp2 C and void constituents instead of treating it as a whole. From the interpretation of SE spectra, the film thickness and the volume fractions of sp3 C, sp2 C and void have been derived, respectively. In addition, comparison between SE results and Rutherford backscattering spectroscopy (RBS) and electron energy loss spectroscopy (EELS) results will be given. This work shows that SE using multiple sample analysis method is a very useful optical method to determine sp3 C fractions in DLC films." @default.
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• W2045561241 date "2000-06-01" @default.
• W2045561241 modified "2023-10-01" @default.
• W2045561241 title "Spectroscopic ellipsometry characterization of diamond-like carbon films formed by filtered arc deposition" @default.
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• W2045561241 doi "https://doi.org/10.1016/s0168-583x(00)00016-1" @default.
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