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- W2048981521 abstract "The dependence of the etch rate for LiNb03 on ion beam energy, beam current density and gas flow rate during reactive ion beam etching (RIBE) with CF4 and CHF3 gases have been examined. The influence of the gas flow rate and the pressure in the target chamber on the etched surface topography have also been investigated. The reason for the surface roughening is discussed. The change of the relative dark conductivity of LiNbO3 surface etched by different ions is given. Experimental results show that RIBE can be successfully applied to etching of the surface acoustic wave devices." @default.
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- W2048981521 date "1987-01-01" @default.
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- W2048981521 title "Reactive ion beam etching characteristics of LiNbO3" @default.
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- W2048981521 doi "https://doi.org/10.1016/s0168-583x(87)80202-1" @default.
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