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- W2055012735 abstract "The paper deals with the simulation of the etching step of resists containing silicon, Hith special attention on DESIRE technology, for which purpose a general mathematical model is built which emphasizes the role of the gas-solid reaction at the interface plasma/polymer. Some preliminary simulation results are presented." @default.
- W2055012735 created "2016-06-24" @default.
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- W2055012735 date "1992-02-01" @default.
- W2055012735 modified "2023-10-18" @default.
- W2055012735 title "<title>Mathematical model of the plasma etching of resists containing silicon</title>" @default.
- W2055012735 doi "https://doi.org/10.1117/12.56916" @default.
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