FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2055143965> ?p ?o ?g. }

• W2055143965 endingPage "257" @default.
• W2055143965 startingPage "253" @default.
• W2055143965 abstract "The thermal conductivity of oxide thin films deposited using dc, rf, and ion-beam sputtering is measured in the temperature range 80--400 K using the 3ensuremath{omega} method. Thermal conductivity data for amorphous thin films of ${mathrm{SiO}}_{2}$ are nearly identical to bulk a-${mathrm{SiO}}_{2}$. Data for amorphous ${mathrm{Al}}_{2}$${mathrm{O}}_{3}$, while having a magnitude and temperature dependence similar to bulk amorphous oxides, show a dependence on deposition method; rf sputtering of an ${mathrm{Al}}_{2}$${mathrm{O}}_{3}$ target produces films with a thermal conductivity 35% smaller than films prepared by ion-beam sputtering. Microcrystalline thin films show a rich variety of behavior: the conductivity of ${mathrm{TiO}}_{2}$ films depends on the substrate tempreature ${mathit{T}}_{mathit{s}}$ and approaches the thermal conductivity of bulk ${mathrm{TiO}}_{2}$ ceramics when ${mathit{T}}_{mathit{s}}$ensuremath{simeq}400 ifmmode^circelsetextdegreefi{}C; ${mathrm{HfO}}_{2}$ films show glasslike thermal conductivity independent of annealing temperature up to 900 ifmmode^circelsetextdegreefi{}C; and MgO films display a crystalline thermal conductivity that is greatly reduced relative bulk values." @default.
• W2055143965 created "2016-06-24" @default.
• W2055143965 creator A5000335557 @default.
• W2055143965 creator A5001475799 @default.
• W2055143965 creator A5086021356 @default.
• W2055143965 date "1995-07-01" @default.
• W2055143965 modified "2023-10-16" @default.
• W2055143965 title "Thermal conductivity of sputtered oxide films" @default.
• W2055143965 cites W1986062462 @default.
• W2055143965 cites W2005712065 @default.
• W2055143965 cites W2007654816 @default.
• W2055143965 cites W2018189177 @default.
• W2055143965 cites W2023328807 @default.
• W2055143965 cites W2029701699 @default.
• W2055143965 cites W2041453504 @default.
• W2055143965 cites W2050474344 @default.
• W2055143965 cites W2053435763 @default.
• W2055143965 cites W2053601475 @default.
• W2055143965 cites W2061096477 @default.
• W2055143965 cites W2067255431 @default.
• W2055143965 cites W2070670516 @default.
• W2055143965 cites W2075937489 @default.
• W2055143965 cites W2084324487 @default.
• W2055143965 cites W2098341769 @default.
• W2055143965 cites W2101916562 @default.
• W2055143965 cites W2141923907 @default.
• W2055143965 doi "https://doi.org/10.1103/physrevb.52.253" @default.
• W2055143965 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/9979598" @default.
• W2055143965 hasPublicationYear "1995" @default.
• W2055143965 type Work @default.
• W2055143965 sameAs 2055143965 @default.
• W2055143965 citedByCount "235" @default.
• W2055143965 countsByYear W20551439652012 @default.
• W2055143965 countsByYear W20551439652013 @default.
• W2055143965 countsByYear W20551439652014 @default.
• W2055143965 countsByYear W20551439652015 @default.
• W2055143965 countsByYear W20551439652016 @default.
• W2055143965 countsByYear W20551439652017 @default.
• W2055143965 countsByYear W20551439652018 @default.
• W2055143965 countsByYear W20551439652019 @default.
• W2055143965 countsByYear W20551439652020 @default.
• W2055143965 countsByYear W20551439652021 @default.
• W2055143965 countsByYear W20551439652022 @default.
• W2055143965 countsByYear W20551439652023 @default.
• W2055143965 crossrefType "journal-article" @default.
• W2055143965 hasAuthorship W2055143965A5000335557 @default.
• W2055143965 hasAuthorship W2055143965A5001475799 @default.
• W2055143965 hasAuthorship W2055143965A5086021356 @default.
• W2055143965 hasConcept C111368507 @default.
• W2055143965 hasConcept C113196181 @default.
• W2055143965 hasConcept C121332964 @default.
• W2055143965 hasConcept C127313418 @default.
• W2055143965 hasConcept C145148216 @default.
• W2055143965 hasConcept C159985019 @default.
• W2055143965 hasConcept C171250308 @default.
• W2055143965 hasConcept C185592680 @default.
• W2055143965 hasConcept C19067145 @default.
• W2055143965 hasConcept C192562407 @default.
• W2055143965 hasConcept C22423302 @default.
• W2055143965 hasConcept C26873012 @default.
• W2055143965 hasConcept C2777289219 @default.
• W2055143965 hasConcept C2777855556 @default.
• W2055143965 hasConcept C43617362 @default.
• W2055143965 hasConcept C50774322 @default.
• W2055143965 hasConcept C56052488 @default.
• W2055143965 hasConcept C62520636 @default.
• W2055143965 hasConcept C8010536 @default.
• W2055143965 hasConcept C97346530 @default.
• W2055143965 hasConceptScore W2055143965C111368507 @default.
• W2055143965 hasConceptScore W2055143965C113196181 @default.
• W2055143965 hasConceptScore W2055143965C121332964 @default.
• W2055143965 hasConceptScore W2055143965C127313418 @default.
• W2055143965 hasConceptScore W2055143965C145148216 @default.
• W2055143965 hasConceptScore W2055143965C159985019 @default.
• W2055143965 hasConceptScore W2055143965C171250308 @default.
• W2055143965 hasConceptScore W2055143965C185592680 @default.
• W2055143965 hasConceptScore W2055143965C19067145 @default.
• W2055143965 hasConceptScore W2055143965C192562407 @default.
• W2055143965 hasConceptScore W2055143965C22423302 @default.
• W2055143965 hasConceptScore W2055143965C26873012 @default.
• W2055143965 hasConceptScore W2055143965C2777289219 @default.
• W2055143965 hasConceptScore W2055143965C2777855556 @default.
• W2055143965 hasConceptScore W2055143965C43617362 @default.
• W2055143965 hasConceptScore W2055143965C50774322 @default.
• W2055143965 hasConceptScore W2055143965C56052488 @default.
• W2055143965 hasConceptScore W2055143965C62520636 @default.
• W2055143965 hasConceptScore W2055143965C8010536 @default.
• W2055143965 hasConceptScore W2055143965C97346530 @default.
• W2055143965 hasIssue "1" @default.
• W2055143965 hasLocation W20551439651 @default.
• W2055143965 hasLocation W20551439652 @default.
• W2055143965 hasOpenAccess W2055143965 @default.
• W2055143965 hasPrimaryLocation W20551439651 @default.
• W2055143965 hasRelatedWork W132582492 @default.
• W2055143965 hasRelatedWork W2016301407 @default.
• W2055143965 hasRelatedWork W2070988460 @default.
• W2055143965 hasRelatedWork W2316948141 @default.
• W2055143965 hasRelatedWork W2384986301 @default.

• next