FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2055176960> ?p ?o ?g. }

• W2055176960 abstract "Source Mask Optimization (SMO) describes the co-optimization of the illumination source and mask pattern in the frequency domain. While some restrictions for manufacturable sources and masks are included in the process, the resulting photomasks do not resemble the initial designs. Some common features of SMO masks are that the line edges are heavily fragmented, the minimum design features are small and there is no one-to-one correspondence between design and mask features. When it is not possible to link a single mask feature directly to its resist counterpart, traditional concepts of mask defects no longer apply and photomask inspection emerges as a significant challenge. Aerial Plane Inspection (API) is a lithographic inspection mode that moves the detection of defects to the lithographic plane. They can be deployed to study the lithographic impact of SMO mask defects. This paper briefly reviews SMO and the lithography inspection technologies and explores their applicability to 22nm designs by presenting SMO mask inspection results. These results are compared to simulated wafer print expectations." @default.
• W2055176960 created "2016-06-24" @default.
• W2055176960 creator A5001820805 @default.
• W2055176960 creator A5004229374 @default.
• W2055176960 creator A5013162976 @default.
• W2055176960 creator A5013446737 @default.
• W2055176960 creator A5039176256 @default.
• W2055176960 creator A5045198704 @default.
• W2055176960 creator A5052486554 @default.
• W2055176960 creator A5052687846 @default.
• W2055176960 creator A5052727409 @default.
• W2055176960 creator A5064618246 @default.
• W2055176960 creator A5065040795 @default.
• W2055176960 creator A5074958375 @default.
• W2055176960 creator A5084863194 @default.
• W2055176960 creator A5087265270 @default.
• W2055176960 date "2009-10-01" @default.
• W2055176960 modified "2023-09-23" @default.
• W2055176960 title "SMO photomask inspection in the lithographic plane" @default.
• W2055176960 cites W1986247741 @default.
• W2055176960 cites W2045238654 @default.
• W2055176960 cites W2051050853 @default.
• W2055176960 cites W2053286746 @default.
• W2055176960 cites W2059262487 @default.
• W2055176960 cites W2065641519 @default.
• W2055176960 cites W2072997512 @default.
• W2055176960 cites W2087781574 @default.
• W2055176960 cites W2098870234 @default.
• W2055176960 doi "https://doi.org/10.1117/12.830668" @default.
• W2055176960 hasPublicationYear "2009" @default.
• W2055176960 type Work @default.
• W2055176960 sameAs 2055176960 @default.
• W2055176960 citedByCount "1" @default.
• W2055176960 crossrefType "proceedings-article" @default.
• W2055176960 hasAuthorship W2055176960A5001820805 @default.
• W2055176960 hasAuthorship W2055176960A5004229374 @default.
• W2055176960 hasAuthorship W2055176960A5013162976 @default.
• W2055176960 hasAuthorship W2055176960A5013446737 @default.
• W2055176960 hasAuthorship W2055176960A5039176256 @default.
• W2055176960 hasAuthorship W2055176960A5045198704 @default.
• W2055176960 hasAuthorship W2055176960A5052486554 @default.
• W2055176960 hasAuthorship W2055176960A5052687846 @default.
• W2055176960 hasAuthorship W2055176960A5052727409 @default.
• W2055176960 hasAuthorship W2055176960A5064618246 @default.
• W2055176960 hasAuthorship W2055176960A5065040795 @default.
• W2055176960 hasAuthorship W2055176960A5074958375 @default.
• W2055176960 hasAuthorship W2055176960A5084863194 @default.
• W2055176960 hasAuthorship W2055176960A5087265270 @default.
• W2055176960 hasConcept C105487726 @default.
• W2055176960 hasConcept C120665830 @default.
• W2055176960 hasConcept C121332964 @default.
• W2055176960 hasConcept C127413603 @default.
• W2055176960 hasConcept C138885662 @default.
• W2055176960 hasConcept C14737013 @default.
• W2055176960 hasConcept C160671074 @default.
• W2055176960 hasConcept C171250308 @default.
• W2055176960 hasConcept C192562407 @default.
• W2055176960 hasConcept C199639397 @default.
• W2055176960 hasConcept C204223013 @default.
• W2055176960 hasConcept C2776401178 @default.
• W2055176960 hasConcept C2779227376 @default.
• W2055176960 hasConcept C41008148 @default.
• W2055176960 hasConcept C41895202 @default.
• W2055176960 hasConcept C49040817 @default.
• W2055176960 hasConcept C53524968 @default.
• W2055176960 hasConcept C78371743 @default.
• W2055176960 hasConceptScore W2055176960C105487726 @default.
• W2055176960 hasConceptScore W2055176960C120665830 @default.
• W2055176960 hasConceptScore W2055176960C121332964 @default.
• W2055176960 hasConceptScore W2055176960C127413603 @default.
• W2055176960 hasConceptScore W2055176960C138885662 @default.
• W2055176960 hasConceptScore W2055176960C14737013 @default.
• W2055176960 hasConceptScore W2055176960C160671074 @default.
• W2055176960 hasConceptScore W2055176960C171250308 @default.
• W2055176960 hasConceptScore W2055176960C192562407 @default.
• W2055176960 hasConceptScore W2055176960C199639397 @default.
• W2055176960 hasConceptScore W2055176960C204223013 @default.
• W2055176960 hasConceptScore W2055176960C2776401178 @default.
• W2055176960 hasConceptScore W2055176960C2779227376 @default.
• W2055176960 hasConceptScore W2055176960C41008148 @default.
• W2055176960 hasConceptScore W2055176960C41895202 @default.
• W2055176960 hasConceptScore W2055176960C49040817 @default.
• W2055176960 hasConceptScore W2055176960C53524968 @default.
• W2055176960 hasConceptScore W2055176960C78371743 @default.
• W2055176960 hasLocation W20551769601 @default.
• W2055176960 hasOpenAccess W2055176960 @default.
• W2055176960 hasPrimaryLocation W20551769601 @default.
• W2055176960 hasRelatedWork W1969283070 @default.
• W2055176960 hasRelatedWork W1976544989 @default.
• W2055176960 hasRelatedWork W1977151989 @default.
• W2055176960 hasRelatedWork W1986384732 @default.
• W2055176960 hasRelatedWork W1997889974 @default.
• W2055176960 hasRelatedWork W2001221296 @default.
• W2055176960 hasRelatedWork W2020836476 @default.
• W2055176960 hasRelatedWork W2045238654 @default.
• W2055176960 hasRelatedWork W2052513888 @default.
• W2055176960 hasRelatedWork W2053982681 @default.
• W2055176960 hasRelatedWork W2054587694 @default.
• W2055176960 hasRelatedWork W2059073398 @default.
• W2055176960 hasRelatedWork W2060886350 @default.

• next