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- W2058751044 abstract "Recently, techniques known as 'micro-origami' or 'strain architecture' have emerged for the fabrication of out-of-plane micro- and nanostructures by relaxation of a pair of strain-mismatched thin films. Applications of such structures include optical reflectors, actuators and micropositioners. We illustrate how control of the folding order can generate complex three-dimensional objects from metal-oxide bilayers using this approach. By relying on the fact that narrower structures are released from the substrate first, it is possible to create multi-axis loops and interlinked objects with several sequential release steps, using a single photomask. The structures remain planar until released by XeF2 dry silicon etching, making it possible to integrate them with other MEMS and microelectronic devices early in the process." @default.
- W2058751044 created "2016-06-24" @default.
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- W2058751044 date "2007-08-17" @default.
- W2058751044 modified "2023-10-09" @default.
- W2058751044 title "Single-mask microfabrication of three-dimensional objects from strained bimorphs" @default.
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- W2058751044 doi "https://doi.org/10.1088/0960-1317/17/9/n01" @default.
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