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• W2068884983 endingPage "277" @default.
• W2068884983 startingPage "274" @default.
• W2068884983 abstract "Si/Si1−yCy/Si epitaxial layers grown by reduced pressure chemical vapor deposition (RPCVD) were integrated in nMOS devices. A direct correlation between the interface state density introduced by C at the Si/SiO2 interface and the effective mobility of the electron inversion region has been demonstrated. Interface state densities can be reduced by lowering the growth and subsequent process temperatures. This way, a large amount of carbon atoms are incorporated into substitutional sites and the migration of mobile carbon atoms to the Si cap/SiO2 interface is limited. This leads to a significant improvement of the electrical performances, even for an aggressive channel stack design (ultra-thin epilayer and oxide thickness, high carbon concentrations)." @default.
• W2068884983 created "2016-06-24" @default.
• W2068884983 creator A5006635791 @default.
• W2068884983 creator A5008086763 @default.
• W2068884983 creator A5012520807 @default.
• W2068884983 creator A5013032665 @default.
• W2068884983 creator A5018343848 @default.
• W2068884983 creator A5028774619 @default.
• W2068884983 creator A5033961551 @default.
• W2068884983 creator A5066407622 @default.
• W2068884983 creator A5076856577 @default.
• W2068884983 date "2004-03-01" @default.
• W2068884983 modified "2023-10-16" @default.
• W2068884983 title "Electrical properties of Si1−yCy/Si/SiO2 interface for sub 50 nm strained-channel nMOSFETs" @default.
• W2068884983 cites W1847313923 @default.
• W2068884983 cites W1980006230 @default.
• W2068884983 cites W2015873494 @default.
• W2068884983 cites W2027766353 @default.
• W2068884983 cites W2171023381 @default.
• W2068884983 doi "https://doi.org/10.1016/j.apsusc.2003.08.095" @default.
• W2068884983 hasPublicationYear "2004" @default.
• W2068884983 type Work @default.
• W2068884983 sameAs 2068884983 @default.
• W2068884983 citedByCount "3" @default.
• W2068884983 countsByYear W20688849832013 @default.
• W2068884983 crossrefType "journal-article" @default.
• W2068884983 hasAuthorship W2068884983A5006635791 @default.
• W2068884983 hasAuthorship W2068884983A5008086763 @default.
• W2068884983 hasAuthorship W2068884983A5012520807 @default.
• W2068884983 hasAuthorship W2068884983A5013032665 @default.
• W2068884983 hasAuthorship W2068884983A5018343848 @default.
• W2068884983 hasAuthorship W2068884983A5028774619 @default.
• W2068884983 hasAuthorship W2068884983A5033961551 @default.
• W2068884983 hasAuthorship W2068884983A5066407622 @default.
• W2068884983 hasAuthorship W2068884983A5076856577 @default.
• W2068884983 hasConcept C104779481 @default.
• W2068884983 hasConcept C106782819 @default.
• W2068884983 hasConcept C110738630 @default.
• W2068884983 hasConcept C113843644 @default.
• W2068884983 hasConcept C119599485 @default.
• W2068884983 hasConcept C121332964 @default.
• W2068884983 hasConcept C127413603 @default.
• W2068884983 hasConcept C140205800 @default.
• W2068884983 hasConcept C159985019 @default.
• W2068884983 hasConcept C165801399 @default.
• W2068884983 hasConcept C171250308 @default.
• W2068884983 hasConcept C172385210 @default.
• W2068884983 hasConcept C191897082 @default.
• W2068884983 hasConcept C192562407 @default.
• W2068884983 hasConcept C196806460 @default.
• W2068884983 hasConcept C197162436 @default.
• W2068884983 hasConcept C26873012 @default.
• W2068884983 hasConcept C2778413303 @default.
• W2068884983 hasConcept C2779227376 @default.
• W2068884983 hasConcept C2779851234 @default.
• W2068884983 hasConcept C28413391 @default.
• W2068884983 hasConcept C49040817 @default.
• W2068884983 hasConcept C544956773 @default.
• W2068884983 hasConcept C57410435 @default.
• W2068884983 hasConceptScore W2068884983C104779481 @default.
• W2068884983 hasConceptScore W2068884983C106782819 @default.
• W2068884983 hasConceptScore W2068884983C110738630 @default.
• W2068884983 hasConceptScore W2068884983C113843644 @default.
• W2068884983 hasConceptScore W2068884983C119599485 @default.
• W2068884983 hasConceptScore W2068884983C121332964 @default.
• W2068884983 hasConceptScore W2068884983C127413603 @default.
• W2068884983 hasConceptScore W2068884983C140205800 @default.
• W2068884983 hasConceptScore W2068884983C159985019 @default.
• W2068884983 hasConceptScore W2068884983C165801399 @default.
• W2068884983 hasConceptScore W2068884983C171250308 @default.
• W2068884983 hasConceptScore W2068884983C172385210 @default.
• W2068884983 hasConceptScore W2068884983C191897082 @default.
• W2068884983 hasConceptScore W2068884983C192562407 @default.
• W2068884983 hasConceptScore W2068884983C196806460 @default.
• W2068884983 hasConceptScore W2068884983C197162436 @default.
• W2068884983 hasConceptScore W2068884983C26873012 @default.
• W2068884983 hasConceptScore W2068884983C2778413303 @default.
• W2068884983 hasConceptScore W2068884983C2779227376 @default.
• W2068884983 hasConceptScore W2068884983C2779851234 @default.
• W2068884983 hasConceptScore W2068884983C28413391 @default.
• W2068884983 hasConceptScore W2068884983C49040817 @default.
• W2068884983 hasConceptScore W2068884983C544956773 @default.
• W2068884983 hasConceptScore W2068884983C57410435 @default.
• W2068884983 hasIssue "1-4" @default.
• W2068884983 hasLocation W20688849831 @default.
• W2068884983 hasOpenAccess W2068884983 @default.
• W2068884983 hasPrimaryLocation W20688849831 @default.
• W2068884983 hasRelatedWork W1843330619 @default.
• W2068884983 hasRelatedWork W1982635368 @default.
• W2068884983 hasRelatedWork W2010560015 @default.
• W2068884983 hasRelatedWork W2021000347 @default.
• W2068884983 hasRelatedWork W2061052759 @default.
• W2068884983 hasRelatedWork W2125972477 @default.
• W2068884983 hasRelatedWork W2163064812 @default.
• W2068884983 hasRelatedWork W2544184139 @default.
• W2068884983 hasRelatedWork W4386091237 @default.
• W2068884983 hasRelatedWork W2489087223 @default.
• W2068884983 hasVolume "224" @default.

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