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- W2071307112 abstract "We have demonstrated that the reproducibility of electron beam pulses generated by a high power, cold cathode glow discharge is greatly improved by adding a small continuous keep-alive discharge current. A current of the order of 200 μA was found to limit the shot to shot current variation to within 1.5%. This stabilization in turn reduces by an order of magnitude the fluctuations of the energy density deposited on the target, demonstrating a reliable energy source for surface treatment." @default.
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- W2071307112 date "1997-10-15" @default.
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- W2071307112 title "Stabilization of a cold cathode electron beam glow discharge for surface treatment" @default.
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- W2071307112 doi "https://doi.org/10.1063/1.365723" @default.
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