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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2074046406> ?p ?o ?g. }

• W2074046406 endingPage "436" @default.
• W2074046406 startingPage "432" @default.
• W2074046406 abstract "Reactive and anisotropic etching of magnetic tunnel junction (MTJ) stacked films has been achieved using pulse-time-modulated (TM) plasma. While corrosion and delamination of MTJs are observed in continuous wave discharge plasma, a chlorine pulse-time-modulated plasma achieved a high MTJ etching rate without corrosion or delamination. The authors think that the negative ions enhance the chemical reactions on the surface of magnetic films. The magnetic characteristics are also significantly improved by using TM plasma because of reduced residues and improved tapered profiles. Accordingly, TM plasma etching is a promising candidate for high-rate and damage-free MTJ etching for magnetoresistive random access memory devices." @default.
• W2074046406 created "2016-06-24" @default.
• W2074046406 creator A5019677533 @default.
• W2074046406 creator A5045709379 @default.
• W2074046406 creator A5084880356 @default.
• W2074046406 creator A5085280046 @default.
• W2074046406 date "2007-03-14" @default.
• W2074046406 modified "2023-10-15" @default.
• W2074046406 title "Reactive and anisotropic etching of magnetic tunnel junction films using pulse-time-modulated plasma" @default.
• W2074046406 cites W1973238912 @default.
• W2074046406 cites W1994048359 @default.
• W2074046406 cites W2011428253 @default.
• W2074046406 cites W2044694555 @default.
• W2074046406 cites W2052411671 @default.
• W2074046406 cites W2067478140 @default.
• W2074046406 cites W2072760840 @default.
• W2074046406 cites W2075057095 @default.
• W2074046406 cites W2091041894 @default.
• W2074046406 cites W2125354413 @default.
• W2074046406 cites W2230192582 @default.
• W2074046406 doi "https://doi.org/10.1116/1.2712192" @default.
• W2074046406 hasPublicationYear "2007" @default.
• W2074046406 type Work @default.
• W2074046406 sameAs 2074046406 @default.
• W2074046406 citedByCount "23" @default.
• W2074046406 countsByYear W20740464062012 @default.
• W2074046406 countsByYear W20740464062013 @default.
• W2074046406 countsByYear W20740464062014 @default.
• W2074046406 countsByYear W20740464062016 @default.
• W2074046406 countsByYear W20740464062017 @default.
• W2074046406 countsByYear W20740464062018 @default.
• W2074046406 countsByYear W20740464062020 @default.
• W2074046406 countsByYear W20740464062021 @default.
• W2074046406 countsByYear W20740464062022 @default.
• W2074046406 countsByYear W20740464062023 @default.
• W2074046406 crossrefType "journal-article" @default.
• W2074046406 hasAuthorship W2074046406A5019677533 @default.
• W2074046406 hasAuthorship W2074046406A5045709379 @default.
• W2074046406 hasAuthorship W2074046406A5084880356 @default.
• W2074046406 hasAuthorship W2074046406A5085280046 @default.
• W2074046406 hasConcept C100460472 @default.
• W2074046406 hasConcept C107187091 @default.
• W2074046406 hasConcept C115260700 @default.
• W2074046406 hasConcept C117958382 @default.
• W2074046406 hasConcept C121332964 @default.
• W2074046406 hasConcept C1291036 @default.
• W2074046406 hasConcept C130472188 @default.
• W2074046406 hasConcept C151730666 @default.
• W2074046406 hasConcept C159985019 @default.
• W2074046406 hasConcept C192562407 @default.
• W2074046406 hasConcept C20625102 @default.
• W2074046406 hasConcept C2779227376 @default.
• W2074046406 hasConcept C30239060 @default.
• W2074046406 hasConcept C33220542 @default.
• W2074046406 hasConcept C49040817 @default.
• W2074046406 hasConcept C56202322 @default.
• W2074046406 hasConcept C58097730 @default.
• W2074046406 hasConcept C62520636 @default.
• W2074046406 hasConcept C77928131 @default.
• W2074046406 hasConcept C82706917 @default.
• W2074046406 hasConcept C86803240 @default.
• W2074046406 hasConceptScore W2074046406C100460472 @default.
• W2074046406 hasConceptScore W2074046406C107187091 @default.
• W2074046406 hasConceptScore W2074046406C115260700 @default.
• W2074046406 hasConceptScore W2074046406C117958382 @default.
• W2074046406 hasConceptScore W2074046406C121332964 @default.
• W2074046406 hasConceptScore W2074046406C1291036 @default.
• W2074046406 hasConceptScore W2074046406C130472188 @default.
• W2074046406 hasConceptScore W2074046406C151730666 @default.
• W2074046406 hasConceptScore W2074046406C159985019 @default.
• W2074046406 hasConceptScore W2074046406C192562407 @default.
• W2074046406 hasConceptScore W2074046406C20625102 @default.
• W2074046406 hasConceptScore W2074046406C2779227376 @default.
• W2074046406 hasConceptScore W2074046406C30239060 @default.
• W2074046406 hasConceptScore W2074046406C33220542 @default.
• W2074046406 hasConceptScore W2074046406C49040817 @default.
• W2074046406 hasConceptScore W2074046406C56202322 @default.
• W2074046406 hasConceptScore W2074046406C58097730 @default.
• W2074046406 hasConceptScore W2074046406C62520636 @default.
• W2074046406 hasConceptScore W2074046406C77928131 @default.
• W2074046406 hasConceptScore W2074046406C82706917 @default.
• W2074046406 hasConceptScore W2074046406C86803240 @default.
• W2074046406 hasIssue "3" @default.
• W2074046406 hasLocation W20740464061 @default.
• W2074046406 hasOpenAccess W2074046406 @default.
• W2074046406 hasPrimaryLocation W20740464061 @default.
• W2074046406 hasRelatedWork W1991288435 @default.
• W2074046406 hasRelatedWork W2011001474 @default.
• W2074046406 hasRelatedWork W2035159056 @default.
• W2074046406 hasRelatedWork W2045553774 @default.
• W2074046406 hasRelatedWork W2093631838 @default.
• W2074046406 hasRelatedWork W2196738352 @default.
• W2074046406 hasRelatedWork W2288145299 @default.
• W2074046406 hasRelatedWork W2765886561 @default.
• W2074046406 hasRelatedWork W2896928739 @default.
• W2074046406 hasRelatedWork W2094633807 @default.
• W2074046406 hasVolume "25" @default.
• W2074046406 isParatext "false" @default.

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