FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2099754468> ?p ?o ?g. }

• W2099754468 endingPage "47" @default.
• W2099754468 startingPage "32" @default.
• W2099754468 abstract "We present a large system model capable of producing Pareto charts for several yield metrics, including effective channel length, poly line width, I/sub on/ and I/sub sub/. These Pareto charts enable us to target specific processes for improvement of the yield metric(s). Our neural network model has an accuracy of 80% and can be trained with a small data set to minimize the feedback time in the control loop for the yield. The system we describe has been implemented in a Lucent Technologies microelectronics lab in Orlando, FL." @default.
• W2099754468 created "2016-06-24" @default.
• W2099754468 creator A5021183535 @default.
• W2099754468 creator A5062872291 @default.
• W2099754468 creator A5075992947 @default.
• W2099754468 creator A5083960742 @default.
• W2099754468 creator A5087011604 @default.
• W2099754468 date "2001-01-01" @default.
• W2099754468 modified "2023-09-27" @default.
• W2099754468 title "A system model for feedback control and analysis of yield: A multistep process model of effective gate length, poly line width, and IV parameters" @default.
• W2099754468 cites W1501156205 @default.
• W2099754468 cites W1533618852 @default.
• W2099754468 cites W1552527487 @default.
• W2099754468 cites W1564947197 @default.
• W2099754468 cites W1988605894 @default.
• W2099754468 cites W1998255116 @default.
• W2099754468 cites W2010353172 @default.
• W2099754468 cites W2011117676 @default.
• W2099754468 cites W2028519536 @default.
• W2099754468 cites W2030715034 @default.
• W2099754468 cites W2035459370 @default.
• W2099754468 cites W2076118331 @default.
• W2099754468 cites W2080253819 @default.
• W2099754468 cites W2085575316 @default.
• W2099754468 cites W2092669355 @default.
• W2099754468 cites W2100554839 @default.
• W2099754468 cites W2105465681 @default.
• W2099754468 cites W2108173316 @default.
• W2099754468 cites W2111227295 @default.
• W2099754468 cites W2118223505 @default.
• W2099754468 cites W2124503759 @default.
• W2099754468 cites W2144151405 @default.
• W2099754468 cites W2144492562 @default.
• W2099754468 cites W2146017151 @default.
• W2099754468 cites W2148603752 @default.
• W2099754468 cites W2152703126 @default.
• W2099754468 cites W2156909104 @default.
• W2099754468 cites W2165217207 @default.
• W2099754468 cites W2165758113 @default.
• W2099754468 cites W2170623158 @default.
• W2099754468 cites W2766736793 @default.
• W2099754468 cites W77813735 @default.
• W2099754468 doi "https://doi.org/10.1109/66.909653" @default.
• W2099754468 hasPublicationYear "2001" @default.
• W2099754468 type Work @default.
• W2099754468 sameAs 2099754468 @default.
• W2099754468 citedByCount "6" @default.
• W2099754468 crossrefType "journal-article" @default.
• W2099754468 hasAuthorship W2099754468A5021183535 @default.
• W2099754468 hasAuthorship W2099754468A5062872291 @default.
• W2099754468 hasAuthorship W2099754468A5075992947 @default.
• W2099754468 hasAuthorship W2099754468A5083960742 @default.
• W2099754468 hasAuthorship W2099754468A5087011604 @default.
• W2099754468 hasConcept C111919701 @default.
• W2099754468 hasConcept C118127601 @default.
• W2099754468 hasConcept C119599485 @default.
• W2099754468 hasConcept C127413603 @default.
• W2099754468 hasConcept C134121241 @default.
• W2099754468 hasConcept C137635306 @default.
• W2099754468 hasConcept C15165950 @default.
• W2099754468 hasConcept C154945302 @default.
• W2099754468 hasConcept C155386361 @default.
• W2099754468 hasConcept C17500928 @default.
• W2099754468 hasConcept C176217482 @default.
• W2099754468 hasConcept C187937830 @default.
• W2099754468 hasConcept C191897082 @default.
• W2099754468 hasConcept C192562407 @default.
• W2099754468 hasConcept C198352243 @default.
• W2099754468 hasConcept C21547014 @default.
• W2099754468 hasConcept C24326235 @default.
• W2099754468 hasConcept C2524010 @default.
• W2099754468 hasConcept C2775924081 @default.
• W2099754468 hasConcept C33923547 @default.
• W2099754468 hasConcept C41008148 @default.
• W2099754468 hasConcept C47446073 @default.
• W2099754468 hasConcept C98045186 @default.
• W2099754468 hasConceptScore W2099754468C111919701 @default.
• W2099754468 hasConceptScore W2099754468C118127601 @default.
• W2099754468 hasConceptScore W2099754468C119599485 @default.
• W2099754468 hasConceptScore W2099754468C127413603 @default.
• W2099754468 hasConceptScore W2099754468C134121241 @default.
• W2099754468 hasConceptScore W2099754468C137635306 @default.
• W2099754468 hasConceptScore W2099754468C15165950 @default.
• W2099754468 hasConceptScore W2099754468C154945302 @default.
• W2099754468 hasConceptScore W2099754468C155386361 @default.
• W2099754468 hasConceptScore W2099754468C17500928 @default.
• W2099754468 hasConceptScore W2099754468C176217482 @default.
• W2099754468 hasConceptScore W2099754468C187937830 @default.
• W2099754468 hasConceptScore W2099754468C191897082 @default.
• W2099754468 hasConceptScore W2099754468C192562407 @default.
• W2099754468 hasConceptScore W2099754468C198352243 @default.
• W2099754468 hasConceptScore W2099754468C21547014 @default.
• W2099754468 hasConceptScore W2099754468C24326235 @default.
• W2099754468 hasConceptScore W2099754468C2524010 @default.
• W2099754468 hasConceptScore W2099754468C2775924081 @default.
• W2099754468 hasConceptScore W2099754468C33923547 @default.
• W2099754468 hasConceptScore W2099754468C41008148 @default.
• W2099754468 hasConceptScore W2099754468C47446073 @default.

• next