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- W21254181 abstract "A manufacturable 2 Gb NAND flash memory with 0.044 /spl mu/m/sup 2/ cell size, which is the smallest cell size ever reported in semiconductor memory, is successfully developed with 90 nm NAND flash technology for high density file storage application. The three main key technology features of 90 nm NAND flash technology are advanced KrF lithography with off-axis illumination system equipped with a dipole aperture, reduced stack height of cell, and optimized gate reoxidation affecting tunnel oxide profile." @default.
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- W21254181 date "2003-06-26" @default.
- W21254181 modified "2023-10-18" @default.
- W21254181 title "A 2 Gb NAND flash memory with 0.044 μm/sup 2/ cell size using 90 nm flash technology" @default.
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- W21254181 doi "https://doi.org/10.1109/iedm.2002.1175986" @default.
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