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- W2186155391 abstract "1on the cathodic reactions of copper CMP we investigate the controlling mechanisms, i.e. diffusion versus activation controlled. The reduction of ferric ion (from ferric nitrate) was found to be diffusion controlled while that of hydrogen peroxide showed a dependence on adsorbed intermediates and/or surface states. Reactions that are diffusion controlled would be less susceptible to the presence of adsorbing additives whereas those that depend on adsorbed intermediates would be more susceptible. Altering the rate of reduction of the oxidizing agent in CMP will have a direct impact on the chemical contribution to the polishing and consequently on the total polishing rate." @default.
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- W2186155391 date "1991-01-01" @default.
- W2186155391 modified "2023-09-24" @default.
- W2186155391 title "Effects of Additives on Cathodic Reactions in Copper CMP" @default.
- W2186155391 hasPublicationYear "1991" @default.
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