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- W2377440158 abstract "The paper chooses TiSi and Al targets,a series of AlN/TiSiN nanomultilayered films with different TiSiN layer thickness were deposited on the Si substrate by means of radio frequency magnetron sputtering method.By X-ray diffractometry(XRD),scanning electron microscopy(SEM),high resolution transmission electron microscopy(HRTEM) and nano-indentation techniques research the effect of the microstructure and mechanical properties of AlN/TiSiN nanomultilayered film with the different TiSiN layer thickness.The results showed that with the increase of TiSiN layer thickness,the degree of AlN phase crystallization firstly increased and then decreased,and the Hardness of the coating increased firstly improve and then worsen.The hardness and elastic modulus(280 and 28.97 GPa) is the highest when the TiSiN layer thickness is 0.5 nm.The HRTEM observation show that,when the TiSiN layer thickness is 0.5 nm,TiSiN layer grow epitaxially with AlN layers,and exhibit close-packed hexagonal structure under the template effect of AlN layers,the strengthening of the film can be attributed to the coherent growth structure." @default.
- W2377440158 created "2016-06-24" @default.
- W2377440158 creator A5042664327 @default.
- W2377440158 date "2015-01-01" @default.
- W2377440158 modified "2023-09-25" @default.
- W2377440158 title "Study on microstructure and mechanical properties of AlN /TiSiN nanomultilayered films" @default.
- W2377440158 hasPublicationYear "2015" @default.
- W2377440158 type Work @default.
- W2377440158 sameAs 2377440158 @default.
- W2377440158 citedByCount "0" @default.
- W2377440158 crossrefType "journal-article" @default.
- W2377440158 hasAuthorship W2377440158A5042664327 @default.
- W2377440158 hasConcept C111368507 @default.
- W2377440158 hasConcept C127313418 @default.
- W2377440158 hasConcept C127413603 @default.
- W2377440158 hasConcept C146088050 @default.
- W2377440158 hasConcept C159985019 @default.
- W2377440158 hasConcept C161368742 @default.
- W2377440158 hasConcept C171250308 @default.
- W2377440158 hasConcept C19067145 @default.
- W2377440158 hasConcept C192562407 @default.
- W2377440158 hasConcept C203036418 @default.
- W2377440158 hasConcept C22423302 @default.
- W2377440158 hasConcept C26771246 @default.
- W2377440158 hasConcept C2777289219 @default.
- W2377440158 hasConcept C2779227376 @default.
- W2377440158 hasConcept C2781448156 @default.
- W2377440158 hasConcept C42360764 @default.
- W2377440158 hasConcept C43486711 @default.
- W2377440158 hasConcept C49326732 @default.
- W2377440158 hasConcept C61427134 @default.
- W2377440158 hasConcept C87976508 @default.
- W2377440158 hasConceptScore W2377440158C111368507 @default.
- W2377440158 hasConceptScore W2377440158C127313418 @default.
- W2377440158 hasConceptScore W2377440158C127413603 @default.
- W2377440158 hasConceptScore W2377440158C146088050 @default.
- W2377440158 hasConceptScore W2377440158C159985019 @default.
- W2377440158 hasConceptScore W2377440158C161368742 @default.
- W2377440158 hasConceptScore W2377440158C171250308 @default.
- W2377440158 hasConceptScore W2377440158C19067145 @default.
- W2377440158 hasConceptScore W2377440158C192562407 @default.
- W2377440158 hasConceptScore W2377440158C203036418 @default.
- W2377440158 hasConceptScore W2377440158C22423302 @default.
- W2377440158 hasConceptScore W2377440158C26771246 @default.
- W2377440158 hasConceptScore W2377440158C2777289219 @default.
- W2377440158 hasConceptScore W2377440158C2779227376 @default.
- W2377440158 hasConceptScore W2377440158C2781448156 @default.
- W2377440158 hasConceptScore W2377440158C42360764 @default.
- W2377440158 hasConceptScore W2377440158C43486711 @default.
- W2377440158 hasConceptScore W2377440158C49326732 @default.
- W2377440158 hasConceptScore W2377440158C61427134 @default.
- W2377440158 hasConceptScore W2377440158C87976508 @default.
- W2377440158 hasLocation W23774401581 @default.
- W2377440158 hasOpenAccess W2377440158 @default.
- W2377440158 hasPrimaryLocation W23774401581 @default.
- W2377440158 hasRelatedWork W1130161911 @default.
- W2377440158 hasRelatedWork W1983824066 @default.
- W2377440158 hasRelatedWork W1995015126 @default.
- W2377440158 hasRelatedWork W1996507216 @default.
- W2377440158 hasRelatedWork W1999905447 @default.
- W2377440158 hasRelatedWork W2001070117 @default.
- W2377440158 hasRelatedWork W2017541595 @default.
- W2377440158 hasRelatedWork W2056150287 @default.
- W2377440158 hasRelatedWork W2066657526 @default.
- W2377440158 hasRelatedWork W2192319255 @default.
- W2377440158 hasRelatedWork W2268290543 @default.
- W2377440158 hasRelatedWork W2316085672 @default.
- W2377440158 hasRelatedWork W2321356048 @default.
- W2377440158 hasRelatedWork W2382938549 @default.
- W2377440158 hasRelatedWork W2410516038 @default.
- W2377440158 hasRelatedWork W2912303238 @default.
- W2377440158 hasRelatedWork W2980706838 @default.
- W2377440158 hasRelatedWork W3029328904 @default.
- W2377440158 hasRelatedWork W3135157175 @default.
- W2377440158 hasRelatedWork W3208031905 @default.
- W2377440158 isParatext "false" @default.
- W2377440158 isRetracted "false" @default.
- W2377440158 magId "2377440158" @default.
- W2377440158 workType "article" @default.