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- W2551164023 abstract "The performance of ULSIs (Ultra Large Scale Integrated Circuits) has been dramatically enhanced over 30 years by increasing the number of transistors per unit area and the operation speed per single gate simultaneously by the miniaturization technology through the guiding principle of the scaling rule applied to Si CMOSFETs (Complementary Metal-Oxide-Semiconductor Field Effect Transistors). However, miniaturization of the transistors becomes increasingly difficult due to physical limitations, and the conventional scaling rule will not be enough to enhance the performance of the ULSIs. Thus introducing new device structure, new processes, and new materials become increasingly important. The present status of and future prospects for new semiconductor materials for next generation ULSIs are reviewed in this paper." @default.
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- W2551164023 date "2011-01-01" @default.
- W2551164023 modified "2023-09-27" @default.
- W2551164023 title "Present Status and Future Prospect on ULSIs and Related Semiconductor Materials" @default.
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- W2551164023 hasPublicationYear "2011" @default.
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