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• W2561993380 abstract "Abstract Specific features of the LIGA-technology methods elaborated at the Siberian Synchrotron and Terahertz Radiation Centre (SSTRC, BINP SB RAS) and fabrication of terahertz filters and optical elements based on high-aspect self-bearing microstructures of the pseudo-metallic type are described. The essence of the method consists in deep X-ray lithographic patterning of an organic glass (PMMA) substrate followed by covering its entire surface with a thin layer of metal (silver). The structures produced are using in the experiments at the Novosibirsk free electron laser." @default.
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• W2561993380 date "2016-01-01" @default.
• W2561993380 modified "2023-09-23" @default.
• W2561993380 title "Manufacturing of Self-bearing Microstructures of the Pseudo-metallic Type for Diffraction Experiments in the Terahertz Range" @default.
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• W2561993380 doi "https://doi.org/10.1016/j.phpro.2016.11.029" @default.
• W2561993380 hasPublicationYear "2016" @default.
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