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- W2760648984 abstract "This paper describes a high-resolution energy-efficient CMOS temperature sensor, intended for the temperature compensation of MEMS/quartz frequency references. The sensor is based on silicided poly-silicon thermistors, which are embedded in a Wien-bridge RC filter. When driven at a fixed frequency, the filter exhibits a temperature-dependent phase shift, which is digitized by an energy-efficient continuous-time phase-domain delta-sigma modulator. Implemented in a 0.18-μm CMOS technology, the sensor draws 87 μA from a 1.8 V supply and achieves a resolution of 410 μK <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>rms</sub> in a 5-ms conversion time. This translates into a state-of-the-art resolution figure-of-merit of 0.13 pJ · K <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> . When packaged in ceramic, the sensor achieves an inaccuracy of 0.2 °C (3σ) from -40 °C to 85 °C after a singlepoint calibration and a correction for systematic nonlinearity. This can be reduced to ±0.03 °C (3σ) after a first-order fit. In addition, the sensor exhibits low 1/f noise and packaging shift." @default.
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- W2760648984 date "2018-01-01" @default.
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- W2760648984 title "A Resistor-Based Temperature Sensor With a 0.13 pJ $cdot$ K2 Resolution FoM" @default.
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- W2760648984 doi "https://doi.org/10.1109/jssc.2017.2746671" @default.
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