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- W3036200429 abstract "High resolution scanning electron microscopy (SEM) has become more and more popular for several reason. First, the new field emission (FE) source of electron is now able to produce a high current density electron probe even at very low energies. It is possible to perform analysis with spatial resolution comparable to one obtain in conventional transmission electron microscope (TEM). The major inconvenient of TEM analysis are related to sample preparation. Fabrication of electron transparency film is generally a complex and time consuming process. To fully exploit a SEM, microscope users must have an accurate knowledge of the electron matter interaction. In order to help microscope users determine the appropriate microscope conditions, Monte Carlo simulation programs have been developed. Those programs, use random number sequences and complex models to accurately determine the signals recorded in a SEM (X-Ray and Backscattered electron). With the new generation of powerful personal computers, it is now possible to rapidly predict SEM outputs corresponding to the user’s microscope conditions. The CASINO program is a shareware that can be used to fully exploit a SEM." @default.
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- W3036200429 date "1996-08-11" @default.
- W3036200429 modified "2023-09-23" @default.
- W3036200429 title "How to get the most of a SEM using the CASINO monte carlo program" @default.
- W3036200429 doi "https://doi.org/10.1017/s0424820100163204" @default.
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