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• W3190290773 endingPage "127593" @default.
• W3190290773 startingPage "127593" @default.
• W3190290773 abstract "Effects of pre- and post- microwave annealing (MWA) treatment on electrical characteristics of p-type Ge substrate (pGe) metal-oxide-semiconductor (MOS) devices were investigated in this work. The physical mechanism was studied with an X-ray photoelectron spectroscopy analysis. The pre-MWA treatment, which is similar to conventional post oxidation annealing on interfacial layer (IL), can passivate the oxygen vacancy by chemisorbed oxygen. The excess chemisorbed oxygen atoms may be left at the interface between IL and high-k, which would induce more interface/oxide traps and form more unstable components in IL. The chemisorbed oxygen can be replaced with well-bonded oxygen by using a post-MWA treatment on high-k dielectric, instead of a conventional post deposition annealing. As a result, pGe MOS device with a double-MWA treatment exhibits low equivalent oxide thickness value (~0.65 nm), small frequency dispersion, low interface trap density, and excellent reliability characteristics without increasing the leakage current. The oxygen vacancy passivation and chemisorbed oxygen suppression with a double-MWA treatment are crucial for high performance Ge MOS device and monolithic 3D IC applications." @default.
• W3190290773 created "2021-08-16" @default.
• W3190290773 creator A5005959935 @default.
• W3190290773 creator A5021949593 @default.
• W3190290773 creator A5038015120 @default.
• W3190290773 creator A5046039510 @default.
• W3190290773 creator A5084151403 @default.
• W3190290773 date "2021-10-01" @default.
• W3190290773 modified "2023-10-17" @default.
• W3190290773 title "Effects of pre- and post-microwave annealing treatments on pGe MOS device" @default.
• W3190290773 cites W1981076603 @default.
• W3190290773 cites W1985133274 @default.
• W3190290773 cites W2025173576 @default.
• W3190290773 cites W2042693343 @default.
• W3190290773 cites W2064650306 @default.
• W3190290773 cites W2064749760 @default.
• W3190290773 cites W2079749892 @default.
• W3190290773 cites W2151692786 @default.
• W3190290773 cites W2159033998 @default.
• W3190290773 cites W2319143189 @default.
• W3190290773 cites W2402098622 @default.
• W3190290773 cites W2512725044 @default.
• W3190290773 cites W2603092491 @default.
• W3190290773 cites W2605442996 @default.
• W3190290773 cites W2611312842 @default.
• W3190290773 cites W2733652422 @default.
• W3190290773 cites W2869441390 @default.
• W3190290773 cites W2907180921 @default.
• W3190290773 cites W2911683297 @default.
• W3190290773 cites W2913582193 @default.
• W3190290773 cites W2947842856 @default.
• W3190290773 cites W2948233679 @default.
• W3190290773 cites W2948391700 @default.
• W3190290773 cites W2959498293 @default.
• W3190290773 cites W3005287994 @default.
• W3190290773 cites W3012261939 @default.
• W3190290773 cites W3024610503 @default.
• W3190290773 cites W3027665713 @default.
• W3190290773 cites W3047468366 @default.
• W3190290773 cites W3136835258 @default.
• W3190290773 cites W3173530040 @default.
• W3190290773 cites W2052091950 @default.
• W3190290773 doi "https://doi.org/10.1016/j.surfcoat.2021.127593" @default.
• W3190290773 hasPublicationYear "2021" @default.
• W3190290773 type Work @default.
• W3190290773 sameAs 3190290773 @default.
• W3190290773 citedByCount "1" @default.
• W3190290773 countsByYear W31902907732022 @default.
• W3190290773 crossrefType "journal-article" @default.
• W3190290773 hasAuthorship W3190290773A5005959935 @default.
• W3190290773 hasAuthorship W3190290773A5021949593 @default.
• W3190290773 hasAuthorship W3190290773A5038015120 @default.
• W3190290773 hasAuthorship W3190290773A5046039510 @default.
• W3190290773 hasAuthorship W3190290773A5084151403 @default.
• W3190290773 hasConcept C113196181 @default.
• W3190290773 hasConcept C121332964 @default.
• W3190290773 hasConcept C127413603 @default.
• W3190290773 hasConcept C133386390 @default.
• W3190290773 hasConcept C159985019 @default.
• W3190290773 hasConcept C171250308 @default.
• W3190290773 hasConcept C175708663 @default.
• W3190290773 hasConcept C178790620 @default.
• W3190290773 hasConcept C185592680 @default.
• W3190290773 hasConcept C191897082 @default.
• W3190290773 hasConcept C192562407 @default.
• W3190290773 hasConcept C2777855556 @default.
• W3190290773 hasConcept C2779227376 @default.
• W3190290773 hasConcept C2779851234 @default.
• W3190290773 hasConcept C33574316 @default.
• W3190290773 hasConcept C36003996 @default.
• W3190290773 hasConcept C42360764 @default.
• W3190290773 hasConcept C43617362 @default.
• W3190290773 hasConcept C44838205 @default.
• W3190290773 hasConcept C49040817 @default.
• W3190290773 hasConcept C540031477 @default.
• W3190290773 hasConcept C62520636 @default.
• W3190290773 hasConceptScore W3190290773C113196181 @default.
• W3190290773 hasConceptScore W3190290773C121332964 @default.
• W3190290773 hasConceptScore W3190290773C127413603 @default.
• W3190290773 hasConceptScore W3190290773C133386390 @default.
• W3190290773 hasConceptScore W3190290773C159985019 @default.
• W3190290773 hasConceptScore W3190290773C171250308 @default.
• W3190290773 hasConceptScore W3190290773C175708663 @default.
• W3190290773 hasConceptScore W3190290773C178790620 @default.
• W3190290773 hasConceptScore W3190290773C185592680 @default.
• W3190290773 hasConceptScore W3190290773C191897082 @default.
• W3190290773 hasConceptScore W3190290773C192562407 @default.
• W3190290773 hasConceptScore W3190290773C2777855556 @default.
• W3190290773 hasConceptScore W3190290773C2779227376 @default.
• W3190290773 hasConceptScore W3190290773C2779851234 @default.
• W3190290773 hasConceptScore W3190290773C33574316 @default.
• W3190290773 hasConceptScore W3190290773C36003996 @default.
• W3190290773 hasConceptScore W3190290773C42360764 @default.
• W3190290773 hasConceptScore W3190290773C43617362 @default.
• W3190290773 hasConceptScore W3190290773C44838205 @default.
• W3190290773 hasConceptScore W3190290773C49040817 @default.
• W3190290773 hasConceptScore W3190290773C540031477 @default.
• W3190290773 hasConceptScore W3190290773C62520636 @default.

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