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- W4311567263 abstract "CMOS-compatible Si3N4 waveguide offers the advantage of compact size, low cost, and integrate-ability in optical fiber sensing network. To develop a Si3N4 waveguide chip for the sensing of toxic and carcinogenic pyridine vapor, this work demonstrated the following two aspects in waveguide engineering. The first effort was waveguide material engineering: the functionalization of Si<sub>3</sub>N<sub>4</sub> waveguide by simple spin-coating a sensitive and specific porous dipolar polymer for pyridine detection. The other effort was the waveguide device engineering in virtue of evanescent field and group refractive index regulation to realize the high sensitivity of waveguide. For the Mach-Zehnder interferometer (MZI) with width/height of 1.5 μm/300 nm and 5 mm length, the sensitivities at TE and TM modes were 31587 nm/RIU and 30293 nm/RIU, both of which are exceptionally high for refractive index sensing. Experimentally, the sensor chip was fabricated by standard CMOS process including photolithography and ICP etching. We conceptually demonstrated the sensing of hazardous pyridine vapor with packaged Si3N4 MZI pyridine sensor in optical fiber transmission system. The sensing performance showed that the limit of detection was 1.92 ppm (lower than the threshold limit of 5 ppm for adverse effects) and the sensitivity was as high as 15.6 pm/ppm with a large linear dynamic range of 2.5-400 ppm. And in the subsequent improvement, we obtained the sensitivity of 63 pm/ppm and the detection limit of 476 ppb by optimizing the thickness of sensitive cladding." @default.
- W4311567263 created "2022-12-27" @default.
- W4311567263 creator A5007115504 @default.
- W4311567263 creator A5050981212 @default.
- W4311567263 creator A5052451277 @default.
- W4311567263 creator A5090305024 @default.
- W4311567263 date "2022-12-15" @default.
- W4311567263 modified "2023-09-29" @default.
- W4311567263 title "Polymer-functionalized Si3N4 waveguide Mach-Zehnder interferometer for hazardous pyridine vapor sensing" @default.
- W4311567263 cites W1968307285 @default.
- W4311567263 cites W2035079701 @default.
- W4311567263 cites W2112547131 @default.
- W4311567263 cites W2273671289 @default.
- W4311567263 cites W2734878353 @default.
- W4311567263 cites W3126213881 @default.
- W4311567263 doi "https://doi.org/10.1117/12.2654933" @default.
- W4311567263 hasPublicationYear "2022" @default.
- W4311567263 type Work @default.
- W4311567263 citedByCount "0" @default.
- W4311567263 crossrefType "proceedings-article" @default.
- W4311567263 hasAuthorship W4311567263A5007115504 @default.
- W4311567263 hasAuthorship W4311567263A5050981212 @default.
- W4311567263 hasAuthorship W4311567263A5052451277 @default.
- W4311567263 hasAuthorship W4311567263A5090305024 @default.
- W4311567263 hasConcept C105487726 @default.
- W4311567263 hasConcept C119128265 @default.
- W4311567263 hasConcept C120665830 @default.
- W4311567263 hasConcept C121332964 @default.
- W4311567263 hasConcept C12296473 @default.
- W4311567263 hasConcept C166689943 @default.
- W4311567263 hasConcept C185592680 @default.
- W4311567263 hasConcept C191897082 @default.
- W4311567263 hasConcept C192562407 @default.
- W4311567263 hasConcept C200687136 @default.
- W4311567263 hasConcept C36456112 @default.
- W4311567263 hasConcept C42067758 @default.
- W4311567263 hasConcept C43617362 @default.
- W4311567263 hasConcept C49040817 @default.
- W4311567263 hasConceptScore W4311567263C105487726 @default.
- W4311567263 hasConceptScore W4311567263C119128265 @default.
- W4311567263 hasConceptScore W4311567263C120665830 @default.
- W4311567263 hasConceptScore W4311567263C121332964 @default.
- W4311567263 hasConceptScore W4311567263C12296473 @default.
- W4311567263 hasConceptScore W4311567263C166689943 @default.
- W4311567263 hasConceptScore W4311567263C185592680 @default.
- W4311567263 hasConceptScore W4311567263C191897082 @default.
- W4311567263 hasConceptScore W4311567263C192562407 @default.
- W4311567263 hasConceptScore W4311567263C200687136 @default.
- W4311567263 hasConceptScore W4311567263C36456112 @default.
- W4311567263 hasConceptScore W4311567263C42067758 @default.
- W4311567263 hasConceptScore W4311567263C43617362 @default.
- W4311567263 hasConceptScore W4311567263C49040817 @default.
- W4311567263 hasLocation W43115672631 @default.
- W4311567263 hasOpenAccess W4311567263 @default.
- W4311567263 hasPrimaryLocation W43115672631 @default.
- W4311567263 hasRelatedWork W1585839462 @default.
- W4311567263 hasRelatedWork W2036965063 @default.
- W4311567263 hasRelatedWork W2044832000 @default.
- W4311567263 hasRelatedWork W2081060229 @default.
- W4311567263 hasRelatedWork W2907107824 @default.
- W4311567263 hasRelatedWork W2913983799 @default.
- W4311567263 hasRelatedWork W2935898385 @default.
- W4311567263 hasRelatedWork W3071101642 @default.
- W4311567263 hasRelatedWork W3108550564 @default.
- W4311567263 hasRelatedWork W4293457050 @default.
- W4311567263 isParatext "false" @default.
- W4311567263 isRetracted "false" @default.
- W4311567263 workType "article" @default.