Matches in SemOpenAlex for { <https://semopenalex.org/work/W4322731477> ?p ?o ?g. }
Showing items 1 to 91 of
91
with 100 items per page.
- W4322731477 abstract "Thin film piezoelectric materials are in high demand in microsystem devices, but common materials used are stiff ceramic materials. Flexible piezoelectrics are needed for low frequency applications or devices requiring large deformations, but they are often limited in microfabrication due to their low Curie temperatures. This paper investigates the development of a parylene-based high temperature piezoelectric material, and how crystallinity of the film affects the piezoelectric properties. Increasing the films crystallinity for Parylene-N resulted in an increase in d <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>33</inf> value of 12.6 pC/N when the film was annealed at 350°C and the sample maintained its piezoelectric properties when elevated to >250°C. The results demonstrate that modified Parylene-N thin films can be used a MEMS compatible piezoelectric material at elevated temperatures." @default.
- W4322731477 created "2023-03-03" @default.
- W4322731477 creator A5043950606 @default.
- W4322731477 creator A5069581057 @default.
- W4322731477 date "2023-01-15" @default.
- W4322731477 modified "2023-09-30" @default.
- W4322731477 title "Parylene-N as a high Temperature thin Film Piezoelectric Material" @default.
- W4322731477 cites W1590875599 @default.
- W4322731477 cites W1974441517 @default.
- W4322731477 cites W1984638461 @default.
- W4322731477 cites W2018409502 @default.
- W4322731477 cites W2049570954 @default.
- W4322731477 cites W2066427957 @default.
- W4322731477 cites W2104375361 @default.
- W4322731477 cites W2118264216 @default.
- W4322731477 cites W2148365563 @default.
- W4322731477 cites W2278871106 @default.
- W4322731477 cites W2289031597 @default.
- W4322731477 cites W2419076949 @default.
- W4322731477 cites W2589947961 @default.
- W4322731477 cites W2792471639 @default.
- W4322731477 cites W2898455399 @default.
- W4322731477 cites W2999960303 @default.
- W4322731477 cites W4206951048 @default.
- W4322731477 cites W4288045852 @default.
- W4322731477 doi "https://doi.org/10.1109/mems49605.2023.10052501" @default.
- W4322731477 hasPublicationYear "2023" @default.
- W4322731477 type Work @default.
- W4322731477 citedByCount "0" @default.
- W4322731477 crossrefType "proceedings-article" @default.
- W4322731477 hasAuthorship W4322731477A5043950606 @default.
- W4322731477 hasAuthorship W4322731477A5069581057 @default.
- W4322731477 hasConcept C100082104 @default.
- W4322731477 hasConcept C121332964 @default.
- W4322731477 hasConcept C134132462 @default.
- W4322731477 hasConcept C136525101 @default.
- W4322731477 hasConcept C142724271 @default.
- W4322731477 hasConcept C151054161 @default.
- W4322731477 hasConcept C159985019 @default.
- W4322731477 hasConcept C171250308 @default.
- W4322731477 hasConcept C19067145 @default.
- W4322731477 hasConcept C192562407 @default.
- W4322731477 hasConcept C204787440 @default.
- W4322731477 hasConcept C2777385008 @default.
- W4322731477 hasConcept C37977207 @default.
- W4322731477 hasConcept C46275449 @default.
- W4322731477 hasConcept C49040817 @default.
- W4322731477 hasConcept C521977710 @default.
- W4322731477 hasConcept C527607 @default.
- W4322731477 hasConcept C62520636 @default.
- W4322731477 hasConcept C63648874 @default.
- W4322731477 hasConcept C71924100 @default.
- W4322731477 hasConcept C82217956 @default.
- W4322731477 hasConceptScore W4322731477C100082104 @default.
- W4322731477 hasConceptScore W4322731477C121332964 @default.
- W4322731477 hasConceptScore W4322731477C134132462 @default.
- W4322731477 hasConceptScore W4322731477C136525101 @default.
- W4322731477 hasConceptScore W4322731477C142724271 @default.
- W4322731477 hasConceptScore W4322731477C151054161 @default.
- W4322731477 hasConceptScore W4322731477C159985019 @default.
- W4322731477 hasConceptScore W4322731477C171250308 @default.
- W4322731477 hasConceptScore W4322731477C19067145 @default.
- W4322731477 hasConceptScore W4322731477C192562407 @default.
- W4322731477 hasConceptScore W4322731477C204787440 @default.
- W4322731477 hasConceptScore W4322731477C2777385008 @default.
- W4322731477 hasConceptScore W4322731477C37977207 @default.
- W4322731477 hasConceptScore W4322731477C46275449 @default.
- W4322731477 hasConceptScore W4322731477C49040817 @default.
- W4322731477 hasConceptScore W4322731477C521977710 @default.
- W4322731477 hasConceptScore W4322731477C527607 @default.
- W4322731477 hasConceptScore W4322731477C62520636 @default.
- W4322731477 hasConceptScore W4322731477C63648874 @default.
- W4322731477 hasConceptScore W4322731477C71924100 @default.
- W4322731477 hasConceptScore W4322731477C82217956 @default.
- W4322731477 hasFunder F4320338281 @default.
- W4322731477 hasLocation W43227314771 @default.
- W4322731477 hasOpenAccess W4322731477 @default.
- W4322731477 hasPrimaryLocation W43227314771 @default.
- W4322731477 hasRelatedWork W131819261 @default.
- W4322731477 hasRelatedWork W1990086497 @default.
- W4322731477 hasRelatedWork W2039135686 @default.
- W4322731477 hasRelatedWork W2116194108 @default.
- W4322731477 hasRelatedWork W2281145519 @default.
- W4322731477 hasRelatedWork W2371076247 @default.
- W4322731477 hasRelatedWork W2380084752 @default.
- W4322731477 hasRelatedWork W2888088501 @default.
- W4322731477 hasRelatedWork W4253850484 @default.
- W4322731477 hasRelatedWork W4322731477 @default.
- W4322731477 isParatext "false" @default.
- W4322731477 isRetracted "false" @default.
- W4322731477 workType "article" @default.