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• W4386363004 abstract "This paper presents a control algorithm for a novel micro-electro-mechanical system (MEMS) fast steering mirror (FSM), whose performance is poor in open loop control mode. Based on the characterization and parameter identification of MEMS FSM, an improved double step algorithm is proposed to shorten the settling time and improve its quasi-static working bandwidth. A characterization system is set up, in which optical sensor is utilized to monitor the tilt angle of FSM. The performance of the FSM in the time and frequency domain are both acquired, while the key parameters of the FSM model are identified. Finally, the closed-loop experiments for the FSM are done to verify the effectiveness of the control algorithm. The experimental results demonstrate that the settling time (98%) of the FSM is effectively reduced from 398 ms to 0.4 ms under the improved double step control mode, which has a better tracking performance and tiny overshoot, comparing with the open loop control mode." @default.
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• W4386363004 date "2023-01-01" @default.
• W4386363004 modified "2023-10-07" @default.
• W4386363004 title "Control of a novel MEMS Fast Steering Mirror with improved quasi-static performance" @default.
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• W4386363004 doi "https://doi.org/10.1109/access.2023.3311139" @default.
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