Matches in Wikidata for { <http://www.wikidata.org/entity/Q33318257> ?p ?o ?g. }
- Q33318257 description "1997 nî lūn-bûn" @default.
- Q33318257 description "1997 թուականի Մարտին հրատարակուած գիտական յօդուած" @default.
- Q33318257 description "1997 թվականի մարտին հրատարակված գիտական հոդված" @default.
- Q33318257 description "1997年の論文" @default.
- Q33318257 description "1997年論文" @default.
- Q33318257 description "1997年論文" @default.
- Q33318257 description "1997年論文" @default.
- Q33318257 description "1997年論文" @default.
- Q33318257 description "1997年論文" @default.
- Q33318257 description "1997年论文" @default.
- Q33318257 description "1997年论文" @default.
- Q33318257 description "1997年论文" @default.
- Q33318257 description "1997年论文" @default.
- Q33318257 description "1997年论文" @default.
- Q33318257 description "1997年论文" @default.
- Q33318257 description "1997년 논문" @default.
- Q33318257 description "article científic" @default.
- Q33318257 description "article scientific" @default.
- Q33318257 description "article scientifique (publié 1997)" @default.
- Q33318257 description "articol științific" @default.
- Q33318257 description "articolo scientifico" @default.
- Q33318257 description "artigo científico (publicado na 1997)" @default.
- Q33318257 description "artigo científico (publicado na 1997)" @default.
- Q33318257 description "artigo científico" @default.
- Q33318257 description "artikull shkencor" @default.
- Q33318257 description "artikulong pang-agham" @default.
- Q33318257 description "artykuł naukowy" @default.
- Q33318257 description "artículo científico publicado en 1997" @default.
- Q33318257 description "artículu científicu espublizáu en 1997" @default.
- Q33318257 description "bilimsel makale" @default.
- Q33318257 description "bài báo khoa học" @default.
- Q33318257 description "mokslinis straipsnis" @default.
- Q33318257 description "naučni članak" @default.
- Q33318257 description "scienca artikolo" @default.
- Q33318257 description "scientific article" @default.
- Q33318257 description "teaduslik artikkel" @default.
- Q33318257 description "tieteellinen artikkeli" @default.
- Q33318257 description "tudományos cikk" @default.
- Q33318257 description "vedecký článok" @default.
- Q33318257 description "vetenskaplig artikel" @default.
- Q33318257 description "videnskabelig artikel (udgivet 1997)" @default.
- Q33318257 description "vitenskapelig artikkel" @default.
- Q33318257 description "vitskapeleg artikkel" @default.
- Q33318257 description "vědecký článek" @default.
- Q33318257 description "wetenschappelijk artikel" @default.
- Q33318257 description "wissenschaftlicher Artikel" @default.
- Q33318257 description "επιστημονικό άρθρο" @default.
- Q33318257 description "мақолаи илмӣ" @default.
- Q33318257 description "мақолаи илмӣ" @default.
- Q33318257 description "наукова стаття, опублікована в березні 1997" @default.
- Q33318257 description "научна статия" @default.
- Q33318257 description "научная статья" @default.
- Q33318257 description "научни чланак" @default.
- Q33318257 description "научни чланак" @default.
- Q33318257 description "מאמר מדעי" @default.
- Q33318257 description "سائنسی مضمون" @default.
- Q33318257 description "مقالة علمية" @default.
- Q33318257 description "مقالهٔ علمی" @default.
- Q33318257 description "১৯৯৭-এ প্রকাশিত বৈজ্ঞানিক নিবন্ধ" @default.
- Q33318257 description "บทความทางวิทยาศาสตร์" @default.
- Q33318257 description "სამეცნიერო სტატია" @default.
- Q33318257 name "Titanium oxide film for the bottom antireflective layer in deep ultraviolet lithography." @default.
- Q33318257 name "Titanium oxide film for the bottom antireflective layer in deep ultraviolet lithography." @default.
- Q33318257 name "Titanium oxide film for the bottom antireflective layer in deep ultraviolet lithography." @default.
- Q33318257 type Item @default.
- Q33318257 label "Titanium oxide film for the bottom antireflective layer in deep ultraviolet lithography." @default.
- Q33318257 label "Titanium oxide film for the bottom antireflective layer in deep ultraviolet lithography." @default.
- Q33318257 label "Titanium oxide film for the bottom antireflective layer in deep ultraviolet lithography." @default.
- Q33318257 prefLabel "Titanium oxide film for the bottom antireflective layer in deep ultraviolet lithography." @default.
- Q33318257 prefLabel "Titanium oxide film for the bottom antireflective layer in deep ultraviolet lithography." @default.
- Q33318257 prefLabel "Titanium oxide film for the bottom antireflective layer in deep ultraviolet lithography." @default.
- Q33318257 P1433 Q33318257-B2EBCDF1-0C52-40FB-ADDE-39BC46406BF3 @default.
- Q33318257 P1476 Q33318257-F6BDC693-2D15-40C0-AFF1-85492D08A0AC @default.
- Q33318257 P2093 Q33318257-30C90362-1AA9-4DB8-A85D-D9CA35D9CB68 @default.
- Q33318257 P2093 Q33318257-36A2865A-C596-4C55-BA04-287D02BE07C1 @default.
- Q33318257 P2093 Q33318257-36B487CA-A5FB-47BF-9F13-A8E8393F26CD @default.
- Q33318257 P2093 Q33318257-4C9F0DA9-3FD5-4233-8F30-AA6A92EDB385 @default.
- Q33318257 P2093 Q33318257-59277189-D544-48B3-A42B-B089D5A9D7C0 @default.
- Q33318257 P2093 Q33318257-FC2A062B-4655-4AD4-9A66-0FCBEC0BBAB4 @default.
- Q33318257 P2093 Q33318257-FCD8945F-A240-4253-AD53-8F5163865A98 @default.
- Q33318257 P304 Q33318257-3FD3E828-D491-4BD3-95FF-DFD669560E91 @default.
- Q33318257 P31 Q33318257-2C2E9E95-8AD7-4083-A70A-C7D10F720F25 @default.
- Q33318257 P356 Q33318257-D65DF213-9742-4AF6-99E1-24C9229D9B37 @default.
- Q33318257 P407 Q33318257-1026A1AD-C339-4E0C-B3C0-E49B748278F9 @default.
- Q33318257 P433 Q33318257-87353DB6-B2E5-4BBC-A0C6-600B0BA21A3B @default.
- Q33318257 P478 Q33318257-0D676AEE-EEFE-4795-8D14-5AF098CA4D69 @default.
- Q33318257 P50 Q33318257-A9621B10-66DC-4084-B2B0-A587B5B2CB06 @default.
- Q33318257 P50 Q33318257-B276DBF6-ECB5-4FAC-9324-AA5C34A52F2C @default.
- Q33318257 P50 Q33318257-DC5FE4CA-93B9-4170-BF9E-AC8EA634F883 @default.
- Q33318257 P577 Q33318257-EDD39B7B-966C-4D61-8C7B-3DF7793BD479 @default.
- Q33318257 P698 Q33318257-DFCB8F17-C413-45AB-A150-ED6B55C5183A @default.
- Q33318257 P819 Q33318257-0974BEC2-4D01-40AA-B98C-8120EF464604 @default.
- Q33318257 P921 Q33318257-bff9da1e-108d-412b-8677-457ad7483dca @default.
- Q33318257 P356 AO.36.001482 @default.
- Q33318257 P698 18250825 @default.
- Q33318257 P1433 Q4781557 @default.
- Q33318257 P1476 "Titanium oxide film for the bottom antireflective layer in deep ultraviolet lithography" @default.
- Q33318257 P2093 "D W Kim" @default.
- Q33318257 P2093 "H Y Kang" @default.
- Q33318257 P2093 "J S Lee" @default.