FRINK Linked Data Fragments server
SemOpenAlex
Search SemOpenAlex by triple/quad pattern
subject
predicate
object
graph
Matches in SemOpenAlex for
{ ?s ?p Atomic layer etching of GaN and AlGaN using directional plasma-enhanced approach ?g. }
Showing items 1 to 1 of
1
with
100
items per page.
W2617106871
title
"
Atomic layer etching of GaN and AlGaN using directional plasma-enhanced approach
"
@default
.
