Matches in SemOpenAlex for { <https://semopenalex.org/work/W2617106871> ?p ?o ?g. }
- W2617106871 endingPage "06HB06" @default.
- W2617106871 startingPage "06HB06" @default.
- W2617106871 abstract "The directional atomic layer etching (ALE) of GaN and AlGaN has been developed. The GaN ALE process consists of cyclic Cl2 plasma chemisorption and Ar ion removal. The etch per cycle (EPC) was 0.4 nm within the self-limiting regime, which is 50 to 100 V. The root-mean-square surface roughness RRMS was 0.6 nm, which was improved from an initial roughness of 0.8 nm. For AlGaN ALE, BCl3 was added to the chlorine step to obtain a smooth surface with RRMS of 0.3 nm and stoichiometry similar to the initial sample. The ultra smooth surface obtained by etching is promising for use in next-generation power devices." @default.
- W2617106871 created "2017-06-05" @default.
- W2617106871 creator A5005507923 @default.
- W2617106871 creator A5018763767 @default.
- W2617106871 creator A5034574090 @default.
- W2617106871 creator A5053880237 @default.
- W2617106871 creator A5063368017 @default.
- W2617106871 date "2017-05-25" @default.
- W2617106871 modified "2023-10-11" @default.
- W2617106871 title "Atomic layer etching of GaN and AlGaN using directional plasma-enhanced approach" @default.
- W2617106871 cites W1964422724 @default.
- W2617106871 cites W1965111243 @default.
- W2617106871 cites W1970268204 @default.
- W2617106871 cites W1972548265 @default.
- W2617106871 cites W1975137469 @default.
- W2617106871 cites W1976210511 @default.
- W2617106871 cites W1980412805 @default.
- W2617106871 cites W1984501762 @default.
- W2617106871 cites W1989020001 @default.
- W2617106871 cites W1989758562 @default.
- W2617106871 cites W1994760817 @default.
- W2617106871 cites W1996043014 @default.
- W2617106871 cites W1998608276 @default.
- W2617106871 cites W2001734593 @default.
- W2617106871 cites W2005627880 @default.
- W2617106871 cites W2012093780 @default.
- W2617106871 cites W2014840583 @default.
- W2617106871 cites W2023142060 @default.
- W2617106871 cites W2031829617 @default.
- W2617106871 cites W2033464198 @default.
- W2617106871 cites W2037144455 @default.
- W2617106871 cites W2041883647 @default.
- W2617106871 cites W2042916342 @default.
- W2617106871 cites W2044924796 @default.
- W2617106871 cites W2049461143 @default.
- W2617106871 cites W2050878962 @default.
- W2617106871 cites W2057692555 @default.
- W2617106871 cites W2068123513 @default.
- W2617106871 cites W2070107047 @default.
- W2617106871 cites W2072592857 @default.
- W2617106871 cites W2089796569 @default.
- W2617106871 cites W2093750209 @default.
- W2617106871 cites W2094409865 @default.
- W2617106871 cites W2095567118 @default.
- W2617106871 cites W2095610097 @default.
- W2617106871 cites W2101023917 @default.
- W2617106871 cites W2124964377 @default.
- W2617106871 cites W2146897563 @default.
- W2617106871 cites W2542308738 @default.
- W2617106871 cites W2604013606 @default.
- W2617106871 cites W2604019671 @default.
- W2617106871 doi "https://doi.org/10.7567/jjap.56.06hb06" @default.
- W2617106871 hasPublicationYear "2017" @default.
- W2617106871 type Work @default.
- W2617106871 sameAs 2617106871 @default.
- W2617106871 citedByCount "40" @default.
- W2617106871 countsByYear W26171068712017 @default.
- W2617106871 countsByYear W26171068712018 @default.
- W2617106871 countsByYear W26171068712019 @default.
- W2617106871 countsByYear W26171068712020 @default.
- W2617106871 countsByYear W26171068712021 @default.
- W2617106871 countsByYear W26171068712022 @default.
- W2617106871 countsByYear W26171068712023 @default.
- W2617106871 crossrefType "journal-article" @default.
- W2617106871 hasAuthorship W2617106871A5005507923 @default.
- W2617106871 hasAuthorship W2617106871A5018763767 @default.
- W2617106871 hasAuthorship W2617106871A5034574090 @default.
- W2617106871 hasAuthorship W2617106871A5053880237 @default.
- W2617106871 hasAuthorship W2617106871A5063368017 @default.
- W2617106871 hasConcept C100460472 @default.
- W2617106871 hasConcept C107187091 @default.
- W2617106871 hasConcept C107365816 @default.
- W2617106871 hasConcept C113196181 @default.
- W2617106871 hasConcept C121332964 @default.
- W2617106871 hasConcept C127413603 @default.
- W2617106871 hasConcept C1291036 @default.
- W2617106871 hasConcept C130472188 @default.
- W2617106871 hasConcept C144082473 @default.
- W2617106871 hasConcept C159985019 @default.
- W2617106871 hasConcept C171250308 @default.
- W2617106871 hasConcept C178790620 @default.
- W2617106871 hasConcept C185592680 @default.
- W2617106871 hasConcept C188198153 @default.
- W2617106871 hasConcept C192562407 @default.
- W2617106871 hasConcept C2779227376 @default.
- W2617106871 hasConcept C43617362 @default.
- W2617106871 hasConcept C49040817 @default.
- W2617106871 hasConcept C62520636 @default.
- W2617106871 hasConcept C71039073 @default.
- W2617106871 hasConcept C78519656 @default.
- W2617106871 hasConcept C82706917 @default.
- W2617106871 hasConceptScore W2617106871C100460472 @default.
- W2617106871 hasConceptScore W2617106871C107187091 @default.
- W2617106871 hasConceptScore W2617106871C107365816 @default.
- W2617106871 hasConceptScore W2617106871C113196181 @default.
- W2617106871 hasConceptScore W2617106871C121332964 @default.
- W2617106871 hasConceptScore W2617106871C127413603 @default.
- W2617106871 hasConceptScore W2617106871C1291036 @default.