FRINK Linked Data Fragments server
SemOpenAlex
Search SemOpenAlex by triple/quad pattern
subject
predicate
object
graph
Matches in SemOpenAlex for
{ ?s ?p Statistical approach to linewidth control in a logic fab ?g. }
Showing items 1 to 1 of
1
with
100
items per page.
W2065141034
title
"
Statistical approach to linewidth control in a logic fab
"
@default
.
