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- W2065141034 abstract "We designed an adaptive line width controller specially tailored to the needs of a highly diversified logic fab. Simulations of different controller types fed with historic CD data show advantages of an SPC based controller over a Run by Run controller. This result confirms the SPC assumption that as long as a process is in statistical control, changing the process parameters will only increase the variability of the output." @default.
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- W2065141034 date "1999-04-23" @default.
- W2065141034 modified "2023-09-23" @default.
- W2065141034 title "Statistical approach to linewidth control in a logic fab" @default.
- W2065141034 doi "https://doi.org/10.1117/12.346252" @default.
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