FRINK Linked Data Fragments server
SemOpenAlex
Search SemOpenAlex by triple/quad pattern
subject
predicate
object
graph
Matches in SemOpenAlex for
{ ?s ?p TiN-CVD process optimization for integration with Cu-CVD ?g. }
Showing items 1 to 1 of
1
with
100
items per page.
W2149207622
title
"
TiN-CVD process optimization for integration with Cu-CVD
"
@default
.
