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• W1967888975 endingPage "806" @default.
• W1967888975 startingPage "802" @default.
• W1967888975 abstract "Aluminum nitride (AlN) films were deposited by dc reactive magnetron sputtering on p-Si-(1 0 0) substrate in Ar–N2 gas mixtures. The effects of nitrogen concentration and sputtering power on AlN films deposition rate, crystallographic orientation, refractive index, and surface morphology are investigated by means of several characterization techniques. The results show that AlN films reasonably textured in (0 0 2) orientation with low surface roughness can be obtained with the deposition rate as high as 70 nm/min by the control of either target power or N2 concentration in the gas mixture. Increasing the dc discharge power, Al atoms are not completely nitridized and the Al phases appear, as well as the AlN phases. MIS (Metal–Insulator–Semiconductor) structures were fabricated and electrically evaluated by I–V (current–voltage) and C–V (capacitance–voltage) measurements at high frequency (1 MHz). The results obtained from C–V curves indicate that charges at the dielectric/semiconductor interface occur, and the dielectric constant values (extracted under strong accumulation region) are compatible with those found in literature." @default.
• W1967888975 created "2016-06-24" @default.
• W1967888975 creator A5052731892 @default.
• W1967888975 creator A5078039936 @default.
• W1967888975 creator A5081682742 @default.
• W1967888975 creator A5087649747 @default.
• W1967888975 date "2011-05-01" @default.
• W1967888975 modified "2023-10-01" @default.
• W1967888975 title "Electrical characterization and morphological properties of AlN films prepared by dc reactive magnetron sputtering" @default.
• W1967888975 cites W1977549645 @default.
• W1967888975 cites W1985826406 @default.
• W1967888975 cites W1989868749 @default.
• W1967888975 cites W2003183347 @default.
• W1967888975 cites W2024697034 @default.
• W1967888975 cites W2045563884 @default.
• W1967888975 cites W2046467719 @default.
• W1967888975 cites W2054342358 @default.
• W1967888975 cites W2061645853 @default.
• W1967888975 cites W2062813441 @default.
• W1967888975 cites W2074143600 @default.
• W1967888975 cites W2077629563 @default.
• W1967888975 cites W2082050360 @default.
• W1967888975 cites W2108233417 @default.
• W1967888975 cites W2145377689 @default.
• W1967888975 cites W2168840227 @default.
• W1967888975 doi "https://doi.org/10.1016/j.mee.2010.06.045" @default.
• W1967888975 hasPublicationYear "2011" @default.
• W1967888975 type Work @default.
• W1967888975 sameAs 1967888975 @default.
• W1967888975 citedByCount "52" @default.
• W1967888975 countsByYear W19678889752012 @default.
• W1967888975 countsByYear W19678889752013 @default.
• W1967888975 countsByYear W19678889752014 @default.
• W1967888975 countsByYear W19678889752015 @default.
• W1967888975 countsByYear W19678889752016 @default.
• W1967888975 countsByYear W19678889752017 @default.
• W1967888975 countsByYear W19678889752018 @default.
• W1967888975 countsByYear W19678889752019 @default.
• W1967888975 countsByYear W19678889752020 @default.
• W1967888975 countsByYear W19678889752022 @default.
• W1967888975 countsByYear W19678889752023 @default.
• W1967888975 crossrefType "journal-article" @default.
• W1967888975 hasAuthorship W1967888975A5052731892 @default.
• W1967888975 hasAuthorship W1967888975A5078039936 @default.
• W1967888975 hasAuthorship W1967888975A5081682742 @default.
• W1967888975 hasAuthorship W1967888975A5087649747 @default.
• W1967888975 hasConcept C107365816 @default.
• W1967888975 hasConcept C111368507 @default.
• W1967888975 hasConcept C113196181 @default.
• W1967888975 hasConcept C119599485 @default.
• W1967888975 hasConcept C123408415 @default.
• W1967888975 hasConcept C127313418 @default.
• W1967888975 hasConcept C127413603 @default.
• W1967888975 hasConcept C133386390 @default.
• W1967888975 hasConcept C147789679 @default.
• W1967888975 hasConcept C151730666 @default.
• W1967888975 hasConcept C159985019 @default.
• W1967888975 hasConcept C165801399 @default.
• W1967888975 hasConcept C171250308 @default.
• W1967888975 hasConcept C17525397 @default.
• W1967888975 hasConcept C185592680 @default.
• W1967888975 hasConcept C19067145 @default.
• W1967888975 hasConcept C192562407 @default.
• W1967888975 hasConcept C194760766 @default.
• W1967888975 hasConcept C22423302 @default.
• W1967888975 hasConcept C2776620479 @default.
• W1967888975 hasConcept C2777289219 @default.
• W1967888975 hasConcept C2779227376 @default.
• W1967888975 hasConcept C2781083372 @default.
• W1967888975 hasConcept C2816523 @default.
• W1967888975 hasConcept C30066665 @default.
• W1967888975 hasConcept C43617362 @default.
• W1967888975 hasConcept C49040817 @default.
• W1967888975 hasConcept C61427134 @default.
• W1967888975 hasConcept C64297162 @default.
• W1967888975 hasConcept C86803240 @default.
• W1967888975 hasConceptScore W1967888975C107365816 @default.
• W1967888975 hasConceptScore W1967888975C111368507 @default.
• W1967888975 hasConceptScore W1967888975C113196181 @default.
• W1967888975 hasConceptScore W1967888975C119599485 @default.
• W1967888975 hasConceptScore W1967888975C123408415 @default.
• W1967888975 hasConceptScore W1967888975C127313418 @default.
• W1967888975 hasConceptScore W1967888975C127413603 @default.
• W1967888975 hasConceptScore W1967888975C133386390 @default.
• W1967888975 hasConceptScore W1967888975C147789679 @default.
• W1967888975 hasConceptScore W1967888975C151730666 @default.
• W1967888975 hasConceptScore W1967888975C159985019 @default.
• W1967888975 hasConceptScore W1967888975C165801399 @default.
• W1967888975 hasConceptScore W1967888975C171250308 @default.
• W1967888975 hasConceptScore W1967888975C17525397 @default.
• W1967888975 hasConceptScore W1967888975C185592680 @default.
• W1967888975 hasConceptScore W1967888975C19067145 @default.
• W1967888975 hasConceptScore W1967888975C192562407 @default.
• W1967888975 hasConceptScore W1967888975C194760766 @default.
• W1967888975 hasConceptScore W1967888975C22423302 @default.
• W1967888975 hasConceptScore W1967888975C2776620479 @default.
• W1967888975 hasConceptScore W1967888975C2777289219 @default.
• W1967888975 hasConceptScore W1967888975C2779227376 @default.

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