FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1996369695> ?p ?o ?g. }

• W1996369695 endingPage "215" @default.
• W1996369695 startingPage "205" @default.
• W1996369695 abstract "The properties of porous silicon prepared at different illumination and electrochemical conditions were studied. The preparation procedure was based on the electrochemical etching in HF containing electrolyte. In the dissolution of n-type silicon, an external source of light is necessary to obtain a sufficient holes flux density. Here, illumination was applied from the backside of the wafer (the side not immersed in the electrolyte), from topside (the side immersed in the electrolyte), and for the highly doped silicon, etching proceeds without illumination. The electrolyte contains HF in the range 2–50 wt%. The highest current density flows with topside assisted illumination. Backside illumination and etching in the dark resulted in a reduction in the current density. In the dark the current density significantly increased at a higher anodic bias. These conditions gave rise to pores formation with a diameter from 20 nm up to 3 μm. The smallest pore size was obtained for highly doped n-Si (111) wafers, etched without illumination. The present paper confirms the possibility of porous silicon formation in the dark and with backside illumination, these being alternative methods for topside assisted illumination etching methods." @default.
• W1996369695 created "2016-06-24" @default.
• W1996369695 creator A5023830953 @default.
• W1996369695 date "2007-04-01" @default.
• W1996369695 modified "2023-09-27" @default.
• W1996369695 title "Nanoporous silicon fabricated at different illumination and electrochemical conditions" @default.
• W1996369695 cites W1964703643 @default.
• W1996369695 cites W1981116022 @default.
• W1996369695 cites W1981660164 @default.
• W1996369695 cites W1983004968 @default.
• W1996369695 cites W1985146488 @default.
• W1996369695 cites W1996122003 @default.
• W1996369695 cites W1999184196 @default.
• W1996369695 cites W2006062825 @default.
• W1996369695 cites W2034314380 @default.
• W1996369695 cites W2042114077 @default.
• W1996369695 cites W2061539917 @default.
• W1996369695 cites W2066780666 @default.
• W1996369695 cites W2072371658 @default.
• W1996369695 cites W2076053560 @default.
• W1996369695 cites W2083644604 @default.
• W1996369695 cites W2162982997 @default.
• W1996369695 cites W4241595281 @default.
• W1996369695 doi "https://doi.org/10.1016/j.spmi.2006.12.003" @default.
• W1996369695 hasPublicationYear "2007" @default.
• W1996369695 type Work @default.
• W1996369695 sameAs 1996369695 @default.
• W1996369695 citedByCount "32" @default.
• W1996369695 countsByYear W19963696952012 @default.
• W1996369695 countsByYear W19963696952013 @default.
• W1996369695 countsByYear W19963696952014 @default.
• W1996369695 countsByYear W19963696952015 @default.
• W1996369695 countsByYear W19963696952016 @default.
• W1996369695 countsByYear W19963696952017 @default.
• W1996369695 countsByYear W19963696952018 @default.
• W1996369695 countsByYear W19963696952019 @default.
• W1996369695 countsByYear W19963696952020 @default.
• W1996369695 countsByYear W19963696952021 @default.
• W1996369695 countsByYear W19963696952022 @default.
• W1996369695 crossrefType "journal-article" @default.
• W1996369695 hasAuthorship W1996369695A5023830953 @default.
• W1996369695 hasConcept C100460472 @default.
• W1996369695 hasConcept C113196181 @default.
• W1996369695 hasConcept C121332964 @default.
• W1996369695 hasConcept C127413603 @default.
• W1996369695 hasConcept C147789679 @default.
• W1996369695 hasConcept C160671074 @default.
• W1996369695 hasConcept C171250308 @default.
• W1996369695 hasConcept C17525397 @default.
• W1996369695 hasConcept C180651308 @default.
• W1996369695 hasConcept C185592680 @default.
• W1996369695 hasConcept C192562407 @default.
• W1996369695 hasConcept C207740977 @default.
• W1996369695 hasConcept C23125352 @default.
• W1996369695 hasConcept C2776685891 @default.
• W1996369695 hasConcept C2779227376 @default.
• W1996369695 hasConcept C42360764 @default.
• W1996369695 hasConcept C43617362 @default.
• W1996369695 hasConcept C48940184 @default.
• W1996369695 hasConcept C49040817 @default.
• W1996369695 hasConcept C52859227 @default.
• W1996369695 hasConcept C544956773 @default.
• W1996369695 hasConcept C57863236 @default.
• W1996369695 hasConcept C62520636 @default.
• W1996369695 hasConcept C68801617 @default.
• W1996369695 hasConcept C88380143 @default.
• W1996369695 hasConcept C89395315 @default.
• W1996369695 hasConceptScore W1996369695C100460472 @default.
• W1996369695 hasConceptScore W1996369695C113196181 @default.
• W1996369695 hasConceptScore W1996369695C121332964 @default.
• W1996369695 hasConceptScore W1996369695C127413603 @default.
• W1996369695 hasConceptScore W1996369695C147789679 @default.
• W1996369695 hasConceptScore W1996369695C160671074 @default.
• W1996369695 hasConceptScore W1996369695C171250308 @default.
• W1996369695 hasConceptScore W1996369695C17525397 @default.
• W1996369695 hasConceptScore W1996369695C180651308 @default.
• W1996369695 hasConceptScore W1996369695C185592680 @default.
• W1996369695 hasConceptScore W1996369695C192562407 @default.
• W1996369695 hasConceptScore W1996369695C207740977 @default.
• W1996369695 hasConceptScore W1996369695C23125352 @default.
• W1996369695 hasConceptScore W1996369695C2776685891 @default.
• W1996369695 hasConceptScore W1996369695C2779227376 @default.
• W1996369695 hasConceptScore W1996369695C42360764 @default.
• W1996369695 hasConceptScore W1996369695C43617362 @default.
• W1996369695 hasConceptScore W1996369695C48940184 @default.
• W1996369695 hasConceptScore W1996369695C49040817 @default.
• W1996369695 hasConceptScore W1996369695C52859227 @default.
• W1996369695 hasConceptScore W1996369695C544956773 @default.
• W1996369695 hasConceptScore W1996369695C57863236 @default.
• W1996369695 hasConceptScore W1996369695C62520636 @default.
• W1996369695 hasConceptScore W1996369695C68801617 @default.
• W1996369695 hasConceptScore W1996369695C88380143 @default.
• W1996369695 hasConceptScore W1996369695C89395315 @default.
• W1996369695 hasIssue "4" @default.
• W1996369695 hasLocation W19963696951 @default.
• W1996369695 hasOpenAccess W1996369695 @default.
• W1996369695 hasPrimaryLocation W19963696951 @default.
• W1996369695 hasRelatedWork W1969379218 @default.

• next