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• W2009771427 abstract "Abstract An evaluation of the hydrogen content present in silicon oxide thin films obtained from a gas mixture of N 2 O and SiH 4 by ArF excimer laser-induced chemical vapor deposition in a parallel configuration reactor is presented. By tuning the oxidant-monosilane ratio, a complete set of films ranging from hydrogen-rich silicon suboxides to silicon dioxide were deposited. To evaluate the bonded hydrogen in the matrix and the total quantity of hydrogen atoms, the films were respectively analyzed by Fourier-transform infrared (FTIR) spectroscopy and elastic recoil detection analysis (ERDA). Additional analyses by ellipsometry and Rutherford backscattering spectrometry (RBS) were performed. As the silane quantity in the gas mixture increases, the RBS measurements reveal a continuously decreasing film stoichiometry towards suboxides. Simultaneously, a dramatical increase in the quantity of SiH bonds is observed in the FTIR spectra, but an unexpected decrease in the total number of hydrogen atoms is detected by ERDA. The total hydrogen content correlates with the film growth rate, while the SiH bond incorporation correlates with the SiH 4 content in the gas mixture." @default.
• W2009771427 created "2016-06-24" @default.
• W2009771427 creator A5001517021 @default.
• W2009771427 creator A5014453313 @default.
• W2009771427 creator A5016221874 @default.
• W2009771427 creator A5031322119 @default.
• W2009771427 creator A5050018106 @default.
• W2009771427 creator A5069115330 @default.
• W2009771427 creator A5076411202 @default.
• W2009771427 creator A5077884675 @default.
• W2009771427 date "1995-07-01" @default.
• W2009771427 modified "2023-10-15" @default.
• W2009771427 title "Hydrogen incorporation in silicon oxide films deposited by ArF laser-induced chemical vapor deposition" @default.
• W2009771427 cites W1552901919 @default.
• W2009771427 cites W2016765776 @default.
• W2009771427 cites W2034028123 @default.
• W2009771427 cites W2044405757 @default.
• W2009771427 cites W2052970291 @default.
• W2009771427 cites W2088565536 @default.
• W2009771427 cites W2089452552 @default.
• W2009771427 cites W2091146614 @default.
• W2009771427 cites W2135590988 @default.
• W2009771427 doi "https://doi.org/10.1016/0022-3093(95)00115-8" @default.
• W2009771427 hasPublicationYear "1995" @default.
• W2009771427 type Work @default.
• W2009771427 sameAs 2009771427 @default.
• W2009771427 citedByCount "6" @default.
• W2009771427 crossrefType "journal-article" @default.
• W2009771427 hasAuthorship W2009771427A5001517021 @default.
• W2009771427 hasAuthorship W2009771427A5014453313 @default.
• W2009771427 hasAuthorship W2009771427A5016221874 @default.
• W2009771427 hasAuthorship W2009771427A5031322119 @default.
• W2009771427 hasAuthorship W2009771427A5050018106 @default.
• W2009771427 hasAuthorship W2009771427A5069115330 @default.
• W2009771427 hasAuthorship W2009771427A5076411202 @default.
• W2009771427 hasAuthorship W2009771427A5077884675 @default.
• W2009771427 hasConcept C113196181 @default.
• W2009771427 hasConcept C127413603 @default.
• W2009771427 hasConcept C144082473 @default.
• W2009771427 hasConcept C147789679 @default.
• W2009771427 hasConcept C159985019 @default.
• W2009771427 hasConcept C160892712 @default.
• W2009771427 hasConcept C171250308 @default.
• W2009771427 hasConcept C178790620 @default.
• W2009771427 hasConcept C18293161 @default.
• W2009771427 hasConcept C185592680 @default.
• W2009771427 hasConcept C19067145 @default.
• W2009771427 hasConcept C191897082 @default.
• W2009771427 hasConcept C192562407 @default.
• W2009771427 hasConcept C2776523803 @default.
• W2009771427 hasConcept C2777431650 @default.
• W2009771427 hasConcept C2778024649 @default.
• W2009771427 hasConcept C2779105228 @default.
• W2009771427 hasConcept C2779851234 @default.
• W2009771427 hasConcept C2780839960 @default.
• W2009771427 hasConcept C38347018 @default.
• W2009771427 hasConcept C42360764 @default.
• W2009771427 hasConcept C43617362 @default.
• W2009771427 hasConcept C512968161 @default.
• W2009771427 hasConcept C544956773 @default.
• W2009771427 hasConcept C57410435 @default.
• W2009771427 hasConceptScore W2009771427C113196181 @default.
• W2009771427 hasConceptScore W2009771427C127413603 @default.
• W2009771427 hasConceptScore W2009771427C144082473 @default.
• W2009771427 hasConceptScore W2009771427C147789679 @default.
• W2009771427 hasConceptScore W2009771427C159985019 @default.
• W2009771427 hasConceptScore W2009771427C160892712 @default.
• W2009771427 hasConceptScore W2009771427C171250308 @default.
• W2009771427 hasConceptScore W2009771427C178790620 @default.
• W2009771427 hasConceptScore W2009771427C18293161 @default.
• W2009771427 hasConceptScore W2009771427C185592680 @default.
• W2009771427 hasConceptScore W2009771427C19067145 @default.
• W2009771427 hasConceptScore W2009771427C191897082 @default.
• W2009771427 hasConceptScore W2009771427C192562407 @default.
• W2009771427 hasConceptScore W2009771427C2776523803 @default.
• W2009771427 hasConceptScore W2009771427C2777431650 @default.
• W2009771427 hasConceptScore W2009771427C2778024649 @default.
• W2009771427 hasConceptScore W2009771427C2779105228 @default.
• W2009771427 hasConceptScore W2009771427C2779851234 @default.
• W2009771427 hasConceptScore W2009771427C2780839960 @default.
• W2009771427 hasConceptScore W2009771427C38347018 @default.
• W2009771427 hasConceptScore W2009771427C42360764 @default.
• W2009771427 hasConceptScore W2009771427C43617362 @default.
• W2009771427 hasConceptScore W2009771427C512968161 @default.
• W2009771427 hasConceptScore W2009771427C544956773 @default.
• W2009771427 hasConceptScore W2009771427C57410435 @default.
• W2009771427 hasLocation W20097714271 @default.
• W2009771427 hasOpenAccess W2009771427 @default.
• W2009771427 hasPrimaryLocation W20097714271 @default.
• W2009771427 hasRelatedWork W1964286440 @default.
• W2009771427 hasRelatedWork W1970742329 @default.
• W2009771427 hasRelatedWork W1971985715 @default.
• W2009771427 hasRelatedWork W1987981238 @default.
• W2009771427 hasRelatedWork W1992330120 @default.
• W2009771427 hasRelatedWork W1992515519 @default.
• W2009771427 hasRelatedWork W1992736123 @default.
• W2009771427 hasRelatedWork W1993827859 @default.
• W2009771427 hasRelatedWork W1995593707 @default.
• W2009771427 hasRelatedWork W2007803766 @default.
• W2009771427 hasRelatedWork W2009515859 @default.

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