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• W2013906760 abstract "A dual-servo nanopositioning stage for high-accuracy rotary motion is presented in this article. A piezoelectric actuator is employed to achieve both the coarse motion and fine motion. By the coarse motion and fine motion, the designed dual-servo nanopositioning stage can obtain large-range rotary motion and high resolution simultaneously. The configuration and motion principle of the dual-servo nanopositioning stage were illustrated and discussed. A prototype was fabricated to test the working performance and the results demonstrate that the maximum speed of the presented dual-servo nanopositioning stage is 32,000 μrad/s and the rotary resolution is about 1.54 μrad. The working performance confirms the feasibility of the dual-servo nanopositioning stage." @default.
• W2013906760 created "2016-06-24" @default.
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• W2013906760 date "2015-04-01" @default.
• W2013906760 modified "2023-10-18" @default.
• W2013906760 title "Design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion" @default.
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• W2013906760 doi "https://doi.org/10.1063/1.4918295" @default.
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