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• W2017241010 abstract "The degradation of polymer layers during plasma etching is studied as a function of their viscoelastic properties. Above Tg, the mobility of polymer chains allows the extension of surface degradation to the entire thickness in a self diffusion mechanism. This effect is particularly important in the case of low molecular weight polymers such as novalaks. The same effect can affect silicon transport during silylation processes." @default.
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• W2017241010 date "1991-03-01" @default.
• W2017241010 modified "2023-09-25" @default.
• W2017241010 title "The role of self diffusion in the dry development and plasma durability of polymers" @default.
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• W2017241010 doi "https://doi.org/10.1016/0167-9317(91)90047-h" @default.
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