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• W2020199380 abstract "ArF excimer laser radiation on Si surface at controlled SF6 atmosphere creates a microstructure whose alteration at various UV doses and SF6 pressures are investigated in this work. Moreover, a rigorous model has been presented here regarding the experiments based on the micro-fluid mechanical properties of molten silicon layer and the subsequent mechanical wave resonance due to the surface shallow fluid theory. The competitive thermal and non-thermal UV laser interaction with Si and the following heat transfer explains the creation of the self-assembled micro-pillars on Si surface." @default.
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• W2020199380 date "2009-02-01" @default.
• W2020199380 modified "2023-09-27" @default.
• W2020199380 title "Dose and pressure dependence of silicon microstructure in SF6 gas due to excimer laser irradiation" @default.
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• W2020199380 doi "https://doi.org/10.1016/j.apsusc.2008.12.024" @default.
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